Properties of tungsten-titanium sputtered coatings

Materials Science Forum

Volumn 352, Issue , 2000, Pages 43-48

  Petrovic S ^a   Perusko D ^a   Rakocevic Z ^a   Gakovic B ^a   Nenadovic T ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; POLISHING; PROTECTIVE COATINGS; SPUTTER DEPOSITION; SURFACE TREATMENT; THIN FILMS; TITANIUM; TUNGSTEN ALLOYS;

TUNGSTEN-TITANIUM SPUTTERED COATINGS;

METALLIC FILMS;

EID: 0342903250     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.352.43     Document Type: Article

References (8)

1. T.M. Nenadović, Materials Science Forum, 214, 163, (1996).
2. th SPIG, Contribute Papers 276, (1998).
3. L. Sangaletti, E. Bontempi, L.E. Depero, J. Mater. Res., 13, No 6, 1568, (1998).
4. C. Lauro, A. Cavalerro, J. Electrochem. Soc. 144, No1, 259, (1997).
5. C. Wang, S. Akbar, W. Chen and V. Patton, J. Mater. Sci., 30, 1627 (1995).
6. J.E. Sungren, H.T. Hentzell, J. Vac. Sci. Technol. A4(5), 2259 (1986).
7. I.M. Rycroft, B.L. Evans, Thin Solid Films, 290-291, 283, (1996).
8. P.J. Burnett, D.S. Rickerby, Thin Solid Films, 148, 51, (1987).