Atomic collision on surfaces and material implementation

Materials Science Forum

Volumn 214, Issue , 1996, Pages 163-170

  Nenadovic, T M ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Atomic Collision; Material Implementation; Sputtering; Thin Films Coatings

Indexed keywords

ATOMIC BEAMS; ATOMS; CHARGE TRANSFER; EVAPORATION; FILM GROWTH; PARTICLE BEAM DYNAMICS; SPUTTERING; SURFACE TREATMENT; VAPOR DEPOSITION;

ATOMIC COLLISION; MATERIAL IMPLEMENTATION;

COATINGS;

EID: 0029747641     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.214.163     Document Type: Article

References (19)

1. T.M. Nenadović, Fizika 21, S1, 392, (1982)
2. H. Kang, S. R. Kasi and J. W. Rabalais, J. Chem. Phys. 88, 5882, (1988)
3. P. Sigmund, Phys. Rev. 184, 383(1969)
4. J.W. Rabalais, D. Marton, Nucl. Instr. and Meth. B67, 287, (1992)
5. T. Nenadović, B. Perraillon, Ž. Bogdanov, Z. Djordjević and M. Milić, Nucl.Instr.and Meth. B 48, 538, (1990)
6. N. Bibić, I.H. Wilson, T. Nenadović, J. Appl. Phys. 53, 5250, (1982)
7. B. A. Movchan, A.V. Demchishin, Fiz. Met. Metall., 28, 83, (1969)
8. L.I. Maissel, R. Glang, Handbook of Thin Film Technology, McGraw-Hill Book Company, New York, (1970)
9. K. Chopra, Thin Film Phenomena, McGraw-Hill Book (1969)
10. J. A. Thornton, Ann. Rev. Matter. Sci., 7, 239(1977)
11. M. Adamov, B. Perović, T. Nenadović, Thin Solid Films, 24, 89(1974)
12. T. Nenadović, M. Nenadović, Novi Materijali (Tehnika) 1-2, 25(1992)
13. th SPIG, Beograd, 1993
14. O. Auciello, R. Kelly, Ion Bombardment Modif. of Surfaces,Elsevier,(1984)
15. T. Nenadović, Z. Fotirić and T. Dimitrijević, Surface Science 33, 607(1972)
16. T. Nenadović, N. Bibić, B. Meckel and M. Milosavljević, Nucl. Instr. and Meth. 182/183, 319(1981)
17. T. Nenadović, R. Simović and T. Jokić, Nucl. Instr. and Meth. B67, 560(1992)
18. J. A. Borders and J. M. Poate, Phys. Rev., B13, 969(1976)
19. T. M. Nenadović, T. P. Mihać and Z. Lj. Rakočević, Thin Solid Films, 218, 247(1992)