W-Ti-O layers for gas-sensing applications: Structure, morphology, and electrical properties

Journal of Materials Research

Volumn 13, Issue 6, 1998, Pages 1568-1575

  Sangaletti, L ^a   Bontempi, E ^a   Depero, L E ^a   Salari, R ^a   Zocchi, M ^a   Nelli, P ^a   Sberveglieri, G ^a   Galinetto, P ^b   Ferroni, M ^c   Guidi, V ^c   Martinelli, G ^c  

^a UNIVERSITY OF BRESCIA   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

^c UNIVERSITY OF FERRARA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MORPHOLOGY; PHASE SEPARATION; PHASE TRANSITIONS; RAMAN SPECTROSCOPY; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS;

PHASE SEGREGATION;

CHEMICAL SENSORS;

EID: 0032094705     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0218     Document Type: Article

References (18)

1. N. Yamazoe and N. Miura, in Gas Sensors, edited by G. Sberveglieri (Kluwer, Dordrecht, 1992), pp. 1-42.
2. C. Cantalini, H. T. Sun, M. Faccio, M. Pelino, S. Santucci, L. Lozzi, and M. Passacantando, Sensors and Actuators B 31, 81 (1996).
3. D. J. Smith, J. F. Velino, R. S. Falconer, and E. L. Wittman, Sensors and Actuators B 13-14, 264 (1993).
4. M. Akiyama, Z. Zhang, J. Tamaki, N. Miura, and N. Yamazoe, Sensors and Actuators B 13-14, 619 (1993).
5. K. Schierbaum, U. Weimar, and W. Goepel, Sensors and Actuators B 7, 709 (1992).
6. L. E. Depero, S. Groppelli, I. Natali-Sora, L. Sangaletti, G. Sberveglieri, and E. Tondello, J. Solid State Chem. 121, 379 (1996).
7. P. Nelli, L. E. Depero, M. Ferroni, S. Groppelli, V. Guidi, F. Ronconi, L. Sangaletti, and G. Sberveglieri, Sensors and Actuators B 31, 8 (1996).
8. L. E. Depero, I. Natali-Sora, C. Perego, L. Sangaletti, and G. Sberveglieri, Sensors and Actuators, B 31, 19 (1996).
9. M. Ferroni, V. Guidi, G. Martinelli, and G. Sberveglieri, J. Mater. Res. 12, 793 (1997).
10. G. Sberveglieri, L. Depero, S. Groppelli, and P. Nelli, Sensor and Actuators B 26, 8 (1995).
11. E. Salje, Acta Cryst. A 31, 360 (1975).
12. M. F. Daniel, B. Desbat, J. C. Lassegues, B. Gerand, and M. Figlarz, J. Solid State Chem. 67, 235 (1987).
13. T. Nanba, Y. Nishiyama, and I. Yasui, J. Mater. Res. 6, 1324 (1991).
14. E. Haro-Poniatowski, R. Rodriguez-Talavera, M. De la Cruz Heredia, O. Cano-Corona, and R. Arroyo-Murillo, J. Mater. Res. 9, 2102 (1994).
15. G. Sberveglieri, L. E. Depero, M. Ferroni, V. Guidi, G. Martinelli, P. Nelli, C. Perego, and L. Sangaletti, Adv. Mater. 8, 334 (1996).
16. M. Ferroni, L. E. Depero, V. Guidi, G. Martinelli, P. Nelli, C. Perego, L. Sangaletti, and G. Sberveglieri, Proceedings of the AISEM Conference, Rome, Feb. 19-20, 1996 (World Scientific, Singapore, 1996).
17. L. Sangaletti, E. Bontempi, L. E. Depero, P. Galinetto, S. Groppelli, R. Salari, and G. Sberveglieri, in Thin Films - Structure and Morphology, edited by R. C. Cammarata, E. H. Chason, T. L. Einstein, and E. D. Williams (Mater. Res. Soc. Symp. Proc. 441, Pittsburgh, PA, 1997).
18. See, e.g., M. J. Madou and S. R. Morrison, Chemical Sensing with Solid State Devices (Academic Press, Boston, 1989), Chaps. 2 and 3, and references therein.