InP-based photonic micro-sensor for near field optical investigations

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 90-93

  Belier B ^a   Castagne, M ^a   Falgayrettes, P ^a   Bonnafe J ^a   Santoso, A ^a   Leclercq, J L ^b  

^a OPTO+   (France)

^b ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; MICROSENSORS; MOLECULAR BEAM EPITAXY; PHOTODIODES; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING; SEMICONDUCTING DIAMONDS; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES;

MICROPHOTONIC SENSORS; NEAR FIELD OPTICAL (NFO) IMAGES;

PHOTODETECTORS;

EID: 0342410323     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591156     Document Type: Article

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