Excimer laser crystallization of SnO2:Sb sol-gel films

Journal of Sol-Gel Science and Technology

Volumn 28, Issue 2, 2003, Pages 227-234

  Sandu, C S ^a   Teodorescu, V S ^a   Ghica, C ^a   Hoffmann, P ^b   Bret, T ^b   Brioude, A ^b   Blanchin, M G ^c   Roger, J A ^c   Canut, B ^c   Croitoru, M ^d  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b EPFL   (Switzerland)

^c UNIVERSITÉ LYON 1   (France)

^d UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Laser beam annealing; Sol gel; TCO; Transmission electron microscopy

Indexed keywords

ANTIMONY; CRYSTALLIZATION; DENSIFICATION; ELECTRIC PROPERTIES; EXCIMER LASERS; IRRADIATION; LASER BEAMS; LASER PULSES; MORPHOLOGY; RAPID THERMAL ANNEALING; TIN COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

LASER BEAM ANNEALING; LASER FLUENCE; LASER IRRADIATION; SOL-GEL PROCESS; TRANSPARENT CONDUCTING OXIDE FILMS;

SOL-GELS;

EID: 0242720777     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026037301769     Document Type: Article

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