Light induced chemical vapour deposition of titanium oxide thin films at room temperature

Applied Surface Science

Volumn 154, Issue , 2000, Pages 146-151

  Halary, E ^a   Benvenuti, G ^a   Wagner, F ^a   Hoffmann, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; GLASS; LASER ABLATION; OXYGEN; PULSED LASER APPLICATIONS; THERMAL EFFECTS; THIN FILMS; TITANIUM OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

PHOTODEPOSITION; TITANIUM TETRAISOPROPOXIDE;

OPTICAL FILMS;

EID: 0033873227     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00425-0     Document Type: Article

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