Self-consistent simulation and modeling of electrostatically deformed diaphragms

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 28-32

  Osterberg, P ^a   Yie, H ^a   Cai, X ^a   White, J ^a   Senturia, S ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELEMENT METHOD; CAPACITORS; COMPUTATIONAL METHODS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; CONVERGENCE OF NUMERICAL METHODS; DIAPHRAGMS; ELECTROSTATICS; FINITE ELEMENT METHOD; LOADS (FORCES); MATHEMATICAL MODELS; THREE DIMENSIONAL;

ELECTROSTATIC FORCES; LUMPED MODEL; MECHANICAL LOADS;

MICROELECTROMECHANICAL DEVICES;

EID: 0027989013     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)