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Journal of Electroanalytical Chemistry

Volumn 559, Issue , 2003, Pages 125-130

Re-dissolution of copper deposited onto porous silicon in immersion plating

(5) Sasano, J a Murota, R a Yamauchi, Y a Sakka, T a Ogata, Y H a

a KYOTO UNIVERSITY (Japan)

Author keywords

Copper; Dissolved oxygen; Immersion plating; Porous silicon

Indexed keywords

MICROMACHINING; OXIDATION; PLATING; POROUS SILICON; REDOX REACTIONS;

IMMERSION PLATING;

COPPER;

EID: 0242573435 PISSN: 15726657 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0728(03)00383-8 Document Type: Conference Paper

Times cited : (29)

References (29)

1
- 84885757292
- Uhlir A. Jr. Bell System Tech. J. 35:1956;333.
- (1956) Bell System Tech. J. , vol.35 , pp. 333
- Uhlir Jr., A.¹

2
- 0141775174
- Canham L.T. Appl. Phys. Lett. 57:1990;1046.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1046
- Canham, L.T.¹

3
- 0029492091
- Canham L.T. Adv. Mater. (Germany). 7:1995;1033.
- (1995) Adv. Mater. (Germany) , vol.7 , pp. 1033
- Canham, L.T.¹

4
- 0029210773
- Berger M.G., Thönissen M., Arens-Fischer R., Münder H., Lüth H., Arntzen M., Theiß W. Thin Solid Films. 255:1995;313.
- (1995) Thin Solid Films , vol.255 , pp. 313
- Berger, M.G.¹ Thönissen, M.² Arens-Fischer, R.³ Münder, H.⁴ Lüth, H.⁵ Arntzen, M.⁶ Theiß, W.⁷

5
- 0035971003
- Han P.G., Wong H., Poon M.C. Colloid. Surf. A. 179:2001;171.
- (2001) Colloid. Surf. A , vol.179 , pp. 171
- Han, P.G.¹ Wong, H.² Poon, M.C.³

6
- 0028426114
- Lang W., Steiner P., Schaber U., Richter A. Sens. Actuators A. 43:1994;185.
- (1994) Sens. Actuators A , vol.43 , pp. 185
- Lang, W.¹ Steiner, P.² Schaber, U.³ Richter, A.⁴

7
- 0029235892
- Jeske M., Schultze J.W., Thönissen M., Münder H. Thin Solid Films. 255:1995;63.
- (1995) Thin Solid Films , vol.255 , pp. 63
- Jeske, M.¹ Schultze, J.W.² Thönissen, M.³ Münder, H.⁴

8
- 0031122296
- Montès L., Muller F., Gaspard F., Hérino R. Thin Solid Films. 297:1997;35.
- (1997) Thin Solid Films , vol.297 , pp. 35
- Montès, L.¹ Muller, F.² Gaspard, F.³ Hérino, R.⁴

9
- 0026842859
- Li J. J. Electrochem. Soc. 139:1992;L37.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 37
- Li, J.¹

10
- 0032472154
- Li H., Chen H., Dong S., Yang J., Deng J.-F. Appl. Surf. Sci. 125:1998;115.
- (1998) Appl. Surf. Sci. , vol.125 , pp. 115
- Li, H.¹ Chen, H.² Dong, S.³ Yang, J.⁴ Deng, J.-F.⁵

11
- 0024606936
- Ting C.H., Paunovic M. J. Electrochem. Soc. 136:1989;456.
- (1989) J. Electrochem. Soc. , vol.136 , pp. 456
- Ting, C.H.¹ Paunovic, M.²

12
- 0001344719
- Andsager D., Hilliard J., Hetrick J.M., AbuHassan L.H., Plisch M., Nayfeh M.H. J. Appl. Phys. 74:1993;4783.
- (1993) J. Appl. Phys. , vol.74 , pp. 4783
- Andsager, D.¹ Hilliard, J.² Hetrick, J.M.³ Abuhassan, L.H.⁴ Plisch, M.⁵ Nayfeh, M.H.⁶

13
- 0027855140
- Coulthard I., Jiang D.-T., Loriner J.W., Sham T.K. Langmuir. 9:1993;3441.
- (1993) Langmuir , vol.9 , pp. 3441
- Coulthard, I.¹ Jiang, D.-T.² Loriner, J.W.³ Sham, T.K.⁴

14
- 0000154155
- Sham T.K., Coulthard I., Lorimer J.W., Hiraya A., Watanabe M. Chem. Mater. 6:1994;2085.
- (1994) Chem. Mater. , vol.6 , pp. 2085
- Sham, T.K.¹ Coulthard, I.² Lorimer, J.W.³ Hiraya, A.⁴ Watanabe, M.⁵

15
- 0028491285
- Hilliard J., Andsager D., Neyfeh H.M., Neyfeh M.H. J. Appl. Phys. 76:1994;2423.
- (1994) J. Appl. Phys. , vol.76 , pp. 2423
- Hilliard, J.¹ Andsager, D.² Neyfeh, H.M.³ Neyfeh, M.H.⁴

16
- 0001176310
- Sham T.K., Naftel S.J., Coulthard I. J. Appl. Phys. 79:1996;7134.
- (1996) J. Appl. Phys. , vol.79 , pp. 7134
- Sham, T.K.¹ Naftel, S.J.² Coulthard, I.³

17
- 0032020823
- Coulthard I., Sham T.K. Solid State Commun. 105:1997;751.
- (1997) Solid State Commun. , vol.105 , pp. 751
- Coulthard, I.¹ Sham, T.K.²

18
- 0032473790
- Coulthard I., Sham T.K. Appl. Surf. Sci. 126:1998;287.
- (1998) Appl. Surf. Sci. , vol.126 , pp. 287
- Coulthard, I.¹ Sham, T.K.²

19
- 0000092774
- Tsuboi T., Sakka T., Ogata Y.H. J. Appl. Phys. 83:1998;4501.
- (1998) J. Appl. Phys. , vol.83 , pp. 4501
- Tsuboi, T.¹ Sakka, T.² Ogata, Y.H.³

20
- 0032660744
- Tsuboi T., Sakka T., Ogata Y.H. Appl. Surf. Sci. 147:1999;6.
- (1999) Appl. Surf. Sci. , vol.147 , pp. 6
- Tsuboi, T.¹ Sakka, T.² Ogata, Y.H.³

21
- 0034431325
- Ogata Y.H., Sasano J., Jorné J., Tsuboi T., Harraz F.A., Sakka T. Phys. Status Solidi A. 182:2000;71.
- (2000) Phys. Status Solidi A , vol.182 , pp. 71
- Ogata, Y.H.¹ Sasano, J.² Jorné, J.³ Tsuboi, T.⁴ Harraz, F.A.⁵ Sakka, T.⁶

22
- 0010877342
- Shu K.Y., Kim Y.S., Park S.Y., Lee H.H. J. Electrochem. Soc. 148:2001;C439.
- (2001) J. Electrochem. Soc. , vol.148 , pp. 439
- Shu, K.Y.¹ Kim, Y.S.² Park, S.Y.³ Lee, H.H.⁴

23
- 0036747455
- Harraz F.A., Tsuboi T., Sasano J., Sakka T., Ogata Y.H. J. Electrochem. Soc. 149:2002;C456.
- (2002) J. Electrochem. Soc. , vol.149 , pp. 456
- Harraz, F.A.¹ Tsuboi, T.² Sasano, J.³ Sakka, T.⁴ Ogata, Y.H.⁵

24
- 0038517009
- Harraz F.A., Sasano J., Sakka T., Ogata Y.H. J. Electrochem. Soc. 150:2003;C277.
- (2003) J. Electrochem. Soc. , vol.150 , pp. 277
- Harraz, F.A.¹ Sasano, J.² Sakka, T.³ Ogata, Y.H.⁴

25
- 0029206967
- Ogata Y., Niki H., Sakka T., Iwasaki M. J. Electrochem. Soc. 142:1995;195.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 195
- Ogata, Y.¹ Niki, H.² Sakka, T.³ Iwasaki, M.⁴

26
- 0001185727
- Belmont O., Bellet D., Bréchet Y. J. Appl. Phys. 79:1996;7586.
- (1996) J. Appl. Phys. , vol.79 , pp. 7586
- Belmont, O.¹ Bellet, D.² Bréchet, Y.³

27
- 0003685523
- London: Pergamon Press
- Pourbaix M. Atlas of Electrochemical Equilibria in Aqueous Solutions. 1st ed. 1966;387 Pergamon Press, London.
- (1966) Atlas of Electrochemical Equilibria in Aqueous Solutions 1st Ed. , pp. 387
- Pourbaix, M.¹

28
- 0031070077
- Bertagna V., Plougonven C., Rouelle F., Chemla M. J. Electroanal. Chem. 422:1997;115.
- (1997) J. Electroanal. Chem. , vol.422 , pp. 115
- Bertagna, V.¹ Plougonven, C.² Rouelle, F.³ Chemla, M.⁴

29
- 0032678002
- Parkhutik V.P., Matveeva E. Electrochem. Solid State Lett. 2:1999;371.
- (1999) Electrochem. Solid State Lett. , vol.2 , pp. 371
- Parkhutik, V.P.¹ Matveeva, E.²

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