Macro-particle reduction mechanism in biased arc ion plating of TiN

Surface and Coatings Technology

Volumn 176, Issue 1, 2003, Pages 109-114

  Huang, Meidong ^a,b   Lin, Guoqiang ^a   Zhao, Yanhui ^a,b   Sun, Chao ^b   Wen, Lishi ^a,b   Dong, Chuang ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

Arc evaporation; Ion plating; Macro particles; Pulsed; TiN

Indexed keywords

CONTAMINATION; TITANIUM NITRIDE;

ARC ION PLATING;

PLATING;

ION PLATING;

EID: 0242415498     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00017-3     Document Type: Article

References (28)

1. Tai C.N. Koh E.S. Akari K. Surf. Coat. Technol. 43-44 1990 324
2. Boxman R.L. Goldsmith S. Surf. Coat. Technol. 52 1992 39
3. Hovsepian R. Popov D. Vacuum 45 1994 603
4. Koshi K. Holsa J. Juliet P. Surf. Coat. Technol. 115 1999 163
5. Tay B.K. Shi X. Cheah L.K. Flynn D.I. Thin Solid Films 308-309 1997 199
6. Lau S.P. Cheng Y.H. Shi J.R. Cao P. Tay B.K. Shi X. Thin Solid Films 398-399 2001 539
7. Olbrich W. Fessmann J. Kampschulte G. Ebberink J. Surf. Coat. Technol. 49 1991 258
8. Fessmann J. Olbrich W. Kampschulte G. Ebberink J. Mater. Sci. Eng. A 140 1991 830
9. Keidar M. Surf. Coat. Technol. 86-87 1996 415
10. Keidar M. IEEE Trans. Plasma Sci. 23 6 1995 902
11. Boxman R.L. Goldsmith S. J. Appl. Phys. 52 1 1981 151
12. Winske D. Jones M.E. IEEE Trans. Plasma Sci. 22 1994 454
13. Chen X. IEEE Trans. Plasma Sci. 25 1997 1117
14. Nitter T. Plasma Sources Sci. Technol. 5 1996 93
15. Beilis I.I., et-al. IEEE Trans. Plasma Sci. 25 2 1997 346
16. R.L. Merlino, A. Barkan, N.D. Angelo, W. Xu, B. Song, Laboratory experiments in dusty plasmas, in International Conference on Plasma Physics, AIP Conf. Proc., Brazil (1994) 295
17. Barkan A. D'Angelo N. Merlino R.L. Phys. Rev. Lett. 73 1994 3093
18. Baouchi A.W. Perry A.J. Surf. Coat. Technol. 49 1991 253
19. Keidar M. Beilis I.I. IEEE Trans. Plasma Sci. 27 1999 810
20. Keidar M. J. Vac. Sci. Technol. A 17 5 1999 3067
21. Zeng P. Hu S.J. Xie G.R. Huang N.C. Wu Q.B. Trans. Mater. Heat Treatment 22 3 2001 62-66
22. Cheng Z.Y. Wang M. Zou J.Y. Surf. Coat. Technol. 92 1997 50
23. Wu J.J. Miller R.J. J. Appl. Phys. 67 1990 1051
24. Melzer A. Trottenbery T. Piel A. Phys. Lett. 191A 1994 301
25. Boxman R.L. Goldsmith S.S. J. Appl. Phys. 52 1 1981 151
26. Boxman R.L. Goldsmith S. Surf. Coat. Technol 52 1992 39
27. Melands F. Nitter T. Aslaksen T.K. Havnes O. J. Vac. Sci. Technol. A 14 2 1996 619
28. Nitter T. Aslaksen T.K. Melands F. Havnes O. IEEE Trans. Plasma Sci. 22 2 1994 159