Transfer wear during CU CMP

Materials Research Society Symposium - Proceedings

Volumn 767, Issue , 2003, Pages 111-118

  Liang, H ^a   Xu, G Helen ^a,c   Martin, J M ^b   Le Mongne, Th ^b  

^a UNIVERSITY OF ALASKA FAIRBANKS   (United States)

^b ECOLE CENTRALE DE LYON   (France)

^c University of Alaska Fairbanks   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; INTERFACES (MATERIALS); WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFACIAL INTERACTIONS;

CHEMICAL MECHANICAL POLISHING;

EID: 0242368133     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-767-f2.7     Document Type: Conference Paper

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