Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR

Pure and Applied Chemistry

Volumn 74, Issue 3, 2002, Pages 459-464

  Pu, Yi Kang ^a   Guo, Zhi Gang ^a   Kang, Zheng De ^a   Ma, Jie ^a   Guan, Zhi Cheng ^a   Zhang, Guang Yu ^a   Wang, En Ge ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; HELIUM; INERT GAS; NITROGEN;

CONFERENCE PAPER; CYCLOTRON; ELECTRON; FLAME PHOTOMETRY; PHYSICAL CHEMISTRY; PLASMA CHEMISTRY; PRIORITY JOURNAL; REACTOR; ULTRAVIOLET RADIATION; VACUUM;

EID: 0036299268     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200274030459     Document Type: Conference Paper

References (14)