SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 141, Issue 1, 2001, Pages 55-61

Thermal stability of TiN thin films investigated by DTG/DTA

(2) Polyakova, Irina G a Hübert, Thomas b

a GREBENSHCHIKOV INSTITUTE OF SILICATE CHEMISTRY (Russian Federation)

b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING (Germany)

Author keywords

Arc evaporation; Differential thermal analysis (DTA); Reactive sputtering; Thermal degradation; Titanium nitride

Indexed keywords

ALUMINUM; DIFFERENTIAL THERMAL ANALYSIS; NIOBIUM; OXIDATION; PHYSICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS; THIN FILMS; TITANIUM NITRIDE;

NON ISOTHERMAL OXIDATION;

CERAMIC COATINGS;

COATING; FILM; OXIDATION; STABILITY; TITANIUM NITRIDE;

EID: 0035806064 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01042-8 Document Type: Article

Times cited : (41)

References (24)

1
- 0003362830
- (1956) Zh. Phizicheskoj Khimii (J. Phys. Chem., in Russian) , vol.30 , pp. 1258
- Samsonov, G.V.¹ Golubeva, N.K.²

2
- 84942968862
- (1957) Z. Phys. Chem , vol.13 , Issue.1-2 , pp. 59-75
- Münster, A.¹ Schlamp, G.²

3
- 84942962745
- (1957) Z. Phys. Chem , vol.13 , Issue.1-2 , pp. 76-94
- Münster, A.¹ Schlamp, G.²

4
- 0004874916
- (1959) Z. Elektrochem , vol.663 , Issue.7 , pp. 807-818
- Münster, A.¹

5
- 0004822311
- (1962) Zh. Neorganicheskoy Khimii (J. Inorg. Chem., in Russian) , vol.5 , pp. 980-982
- Fedoseev, I.V.¹ Nemkova, O.G.²

6
- 33646816952
- (1974) Izvestiya AN SSSR - Neorganicheskie Materialy (The Tidings of AS USSR - Inorg. Mater., in Russian) , vol.110 , pp. 2151-2155
- Zhilyaev, V.A.¹ Alyamovskiy, S.N.² Lyubimov, V.D.³ Shveykin, G.P.⁴

7
- 84932729120
- (1969) Izvestiya AN SSSR - Neorganicheskie Materialy (The Tidings of AS USSR - Inorg. Mater., in Russian) , vol.5 , pp. 1210-1213
- Alyamovskiy, S.I.¹ Shetnikov, E.N.² Shveykin, G.P.³ Gel'd, P.V.⁴

8
- 0004821948
- (1969) Izvestiya AN SSSR - Metally (The Tidings of AS USSR - Metals, in Russian) , pp. 50-53
- Nechaev, Yu.V.¹ Kamyshev, V.M.²

9
- 0043168347
- (1971) Zh. Prikladnoy Khimii (J. Appl. Chem., in Russian) , vol.44 , pp. 1646-1648
- Klimashin, G.M.¹ Kozlovskiy, L.V.² Yasvina, R.N.³

10
- 0004824340
- (1976) Zh. Neorganicheskoy Khimii (J. Inorg. Chem., in Russian) , vol.21 , pp. 2644-2647
- Zaynulin, Yu.G.¹ Alyamovskiy, A.I.² Shveykin, G.V.³

11
- 0015986441
- (1974) High Temp.-High Pressure , vol.6 , pp. 73-84
- Aggour, L.¹ Fitzer, E.² Weisweiler, W.³

12
- 0004847531
- (1976) Phys. Stat. Sol. (a) , vol.34 , pp. 1433-1446
- De Maayer, J.P.¹ Mackenzie, J.D.²

13
- 0023434776
- (1987) J. Solid State Chem , vol.70 , pp. 281-294
- Herzig, P.¹ Redinger, J.² Eibler, R.³ Neckel, A.⁴

14
- 0022080421
- (1985) Thin Solid Films , vol.128 , pp. 21-44
- Sundgren, J.-E.¹

15
- 0023435633
- (1987) Thin Solid Films , vol.153 , pp. 45-53
- Jehn, H.A.¹ Hofmann, S.² Münz, W.-D.³

16
- 84957284408
- (1986) Sci. Technol , vol.4 A , pp. 2784-2788
- Ernsberger, C.¹ Nickerson, J.² Smith, T.³ Miller, A.E.⁴ Banks, D.⁵ Vac, J.⁶

17
- 0020748299
- (1983) J. Electrochem Soc , vol.130 , Issue.5 , pp. 1210-1214
- Suni, I.¹ Sigurd, D.² Ho, K.T.³ Nicolet, M.-A.⁴

18
- 0019633490
- (1981) J. Appl. Phys , vol.52 , Issue.11 , pp. 6659-6664
- Wittmer, M.¹ Noser, J.² Melchior, H.³

19
- 0004903825
- (1970) Poroshkovaya Metallurgiya (Powder Metall., in Russian) , pp. 63-68
- Shveykin, G.P.¹ Slobodin, B.V.²

20
- 0023439871
- (1987) Thin Solid Films , vol.153 , pp. 19-36
- Quinto, D.T.¹ Wolfe, G.J.² Jindal, P.C.³

21
- 0003651522
- 2nd ed. Dep. Chem. Univ. of Houston, Texas
- (1974) Thermal Methods of Analysis
- Wendlandt, W.W.¹

22
- 0003491999
- Academia, Prague
- (1984) Thermophysical Properties of Solids: Their Measurements and Theoretical Thermal Analysis
- Sesták, J.¹

23
- 0004854718
- (1989) J. Appl. Phys , vol.66 , pp. 4743-4746
- Holender, J.M.¹ Soltys, J.²

24
- 0000682032
- (1956) J. Res. Nat. Bur. Stand , vol.57 , pp. 217-221
- Kissinger, H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.