Measurements of neutral plasma species in an argon/isopropyl alcohol plasma for the deposition of organic films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages 1724-1733

  Guerin, Daniel C ^a   Fernsler, Richard F ^a   Shamamian, Vasgen A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; ARGON; FREE RADICALS; HYDROGEN; PRESSURE EFFECTS;

PLASMA SPECIES;

PLASMAS;

EID: 0142122288     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1598971     Document Type: Conference Paper

References (47)

1. H. Muguruma, A. Hiratsuka, and I. Karube, Anal. Chem. 72, 2671 (2000).
2. R. L. Edelstein, C. R. Tamanaha, P. E. Sheehan, M. M. Miller, D. R. Baselt, L. J. Whitman, and R. J. Colton, Biosens. Bioelectron. 14, 805 (2000).
3. A. Hiratsuka, K. Kojima, H. Suzuki, H. Muguruma, K. Ikebukuro, and I. Karube, Analyst (Cambridge, U.K.) 126, 658 (2001).
4. D. B. Haddow, R. M. France, R. D. Short, S. MacNeil, R. A. Dawson, G. J. Leggett, and E. Cooper, J. Biomed. Mater. Res. 47, 379 (1999).
5. N. A. Bullett, R. D. Short, T. O'Leary, A. J. Beck, C. W. I. Douglas, M. Cambray-Deakin, I. W. Fletcher, A. Roberts, and C. Blomfield, Surf. Interface Anal. 31, 1074 (2001).
6. A. Ohl and K. Schroder, Surf. Coat. Technol. 119, 820 (1999).
7. C. G. Golander, J. N. Herron, K. Lim, P. Claesson, P. Stenius, and J. D. Andrade, Poly(Ethylene Glycol) Chemistry (Plenum, New York, 1992).
8. Y. L. J. Wu, R. B. Timmons, J. S. Jen, and F. E. Molock, Colloids Surf., B 18, 235 (2000).
9. X. Gong, L. Dai, H. J. Griesser, and A. W. H. Mau, J. Polym. Sci., Part B: Polym. Phys. 38, 2323 (2000).
10. M. N. Mar, B. D. Ratner, and S. S. Yee, Sens. Actuators B 54, 125 (1999).
11. Y. Hanein, Y. V. Pan, B. D. Ratner, D. D. Denton, and K. F. Bohringer, Sens. Actuators B 81, 49 (2001).
12. M. L. Steen, L. Hymas, E. D. Havey, N. E. Capps, D. G. Castner, and E. R. Fisher, J. Membr. Sci. 188, 97 (2001).
13. H. Yasuda, Plasma Polymerization (Academic, Orlando, 1985).
14. D. Beyer, W. Knoll, H. Ringsdorf, J. H. Wang, R. B. Timmons, and P. Sluka, J. Biomed. Mater. Res. 36, 181 (1997).
15. C. I. Butoi, N. M. Mackie, L. J. Gamble, D. G. Castner, J. Barnd, A. M. Miller, and E. R. Fisher, Chem. Mater. 12, 2014 (2000).
16. A. Hynes and J. P. S. Badyal, Chem. Mater. 10, 2177 (1998).
17. K. K. S. Lau and K. Gleason, J. Phys. Chem. B 101, 6839 (1997).
18. S. Ashida, C. Lee, and M. A. Lieberman, J. Vac. Sci. Technol. A 13, 2498 (1995).
19. T. R. Gengenbach and H. J. Griesser, J. Polym. Sci., Polym. Chem. Ed. 36, 985 (1998).
20. D. C. Guerin, D. D. Hinshelwood, S. Monolache, F. S. Denes, and V. A. Shamamian, Langmuir 18, 4118 (2002).
21. P. N. Brookes, S. Fraser, R. D. Short, L. Hanley, E. Fuoco, A. Roberts, and S. Hutton, J. Electron Speotrosc. Relat. Phenom. 121, 281 (2001).
22. L. Hanley, E. Fuoco, M. B. J. Wijesundara, A. J. Beck, P. N. Brookes, and R. D. Short, J. Vac. Sci. Technol. A 19, 1531 (2001).
23. A. von Keudell, Thin Solid Films 402, 1 (2002).
24. M. Meier and A. von Keudell, J. Appl. Phys. 90, 3585 (2001).
25. A. J. Beck, R. M. France, A. M. Leeson, R. D. Short, A. Goodyear, and N. S. Braithwaite, Chem. Commun. (Cambridge) 11, 1221 (1998).
26. D. B. Haddow, R. M. France, R. D. Short, J. W. Bradley, and D. Barton, Langmuir 16, 5654 (2000).
27. A. J. Beck, S. Candan, R. D. Short, A. Goodyear, and N. S. J. Braithwaite, J. Phys. Chem. B 105, 5730 (2001).
28. C. R. Eddy, D. Leonhardt, S. R. Douglass, B. D. Thoms, V. A. Shamamian, and J. E. Butler, J. Vac. Sci. Technol. A 17, 780 (1999).
29. M. J. Vasile and H. F. Dylla, in Plasma Diagnostics, edited by O. Auciello and D. L. Flamm (Academic, New York, 1989), p. 185.
30. H. Singh, J. W. Coburn, and D. B. Graves, J. Vac. Sci. Technol. A 17, 2447 (1999).
31. J. Dyke, A. Ellis, N. Jonathan, and A. Morris, J. Chem. Soc., Faraday Trans. 81, 1573 (1985).
32. H. Sugai and H. Toyoda, J. Vac. Sci. Technol. A 10, 1193 (1992).
33. F. P. Lossing and G. P. Semeluk, Can. J. Chem. 48, 955 (1970).
34. J. M. Williams and W. H. Hamill, J. Chem. Phys. 49, 4467 (1968).
35. P. M. Mayer and T. Baer, Int. J. Mass Spectrom. Ion Processes 156, 133 (1996).
36. L. Friedman, F. A. Long, and M. Wolfsberg, J. Chem. Phys. 27, 613 (1957).
37. F. W. McLafferty, Interpretation of Mass Spectra, 2nd ed. (Benjamin, Reading, MA, 1973).
38. S. Fraser, R. D. Short, D. Barton, and J. W. Bradley, J. Phys. Chem. B 106, 5596 (2002).
39. A. J. Beck, F. R. Jones, and R. D. Short, J. Chem. Soc., Faraday Trans. 1 94, 559 (1998).
40. S. E. Stein, in NIST Chemistry WebBook, NIST Standard Reference Database; Vol. 69, edited by P. J. Lindstrom and W. G. Mallard (National Institute of Standards and Technology, Gaithersburg, MD, 2002).
41. N. Luo, D. C. Kombo, and R. Osman, J. Phys. Chem. A 101, 926 (1997).
42. J. I. Steinfeld, J. S. Francisco, and W. L. Hase, Chemical Kinetics and Dynamics, 1st ed. (Prentice-Hall, Englewood Cliffs, NJ, 1989).
43. P. W. Seakins, S. H. Robertson, M. J. Pilling, I. R. Slagle, G. W. Gmurczyk, A. Bencsura, D. Gutman, and W. Tsang, J. Phys. Chem. 97, 4450 (1992).
44. Ion-molecule Reactions, edited by J. L. Franklin (Plenum, New York, 1972), Vol. 1.
45. B. Ruscic and J. Berkowitz, J. Chem. Phys. 101, 10936 (1994).
46. R. D. Bowen and A. Maccoll, Org. Mass Spectrom. 19, 379 (1984).
47. J. S. Kim, M. Rao, M. A. Cappelli, S. P. Sharma, and M. Meyyappan, Plasma Sources Sci. Technol. 10, 191 (2001).