Plasma polymerization of thin films: Correlations between plasma chemistry and thin film character

Langmuir

Volumn 18, Issue 10, 2002, Pages 4118-4123

  Guerin, Daniel C ^a   Hinshelwood, David D ^a   Monolache, Sorin ^b   Denes, Ferencz S ^b   Shamamian, Vasgen A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; INDUCTIVELY COUPLED PLASMA; MASS SPECTROMETRY; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ORGANIC THIN FILMS;

THIN FILMS;

EID: 0037076664     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la011566j     Document Type: Article

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