SCOPUS 정보 검색 플랫폼

Volumn 21, Issue 5, 2003, Pages 1680-1682

Reaction between nitrogen gas and silicon species during pulsed laser ablation

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; GASES; LASER ABLATION; NITROGEN; SILICON NITRIDE;

SILICON SPECIES;

THIN FILMS;

EID: 0142090632 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1598974 Document Type: Conference Paper

Times cited : (5)

References (13)

1
- 0026242191
- I. Umezu and K. Maeda, Jpn. J. Appl. Phys., Part 1 30, 2547 (1991).
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 2547
- Umezu, I.¹ Maeda, K.²

2
- 0024628791
- S. Hasegawa, H. Anbutu, and Y. Kurata, Philos. Mag. B 59, 365 (1989).
- (1989) Philos. Mag. B , vol.59 , pp. 365
- Hasegawa, S.¹ Anbutu, H.² Kurata, Y.³

3
- 0000131264
- E. C. Samano, R. Machorro, G. Soto, and L. Cota-Araiza, J. Appl. Phys. 86, 5296 (1998).
- (1998) J. Appl. Phys. , vol.86 , pp. 5296
- Samano, E.C.¹ Machorro, R.² Soto, G.³ Cota-Araiza, L.⁴

4
- 0028513754
- E. Fogarassy, C. Fuchs, A. Slaoui, S. D. Unamuro, J. P. Stoquert, W. Marine, and B. Lang, J. Appl. Phys. 76, 2612 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 2612
- Fogarassy, E.¹ Fuchs, C.² Slaoui, A.³ Unamuro, S.D.⁴ Stoquert, J.P.⁵ Marine, W.⁶ Lang, B.⁷

5
- 0030523221
- I. N. Mihailescu, A. Lita, V. S. Teodorescu, E. Gyorgy, R. Alexandrescu, A. Lunches, M. Martino, and A. Barborica, J. Vac. Sci. Technol. A 14, 1986 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1986
- Mihailescu, I.N.¹ Lita, A.² Teodorescu, V.S.³ Gyorgy, E.⁴ Alexandrescu, R.⁵ Lunches, A.⁶ Martino, M.⁷ Barborica, A.⁸

6
- 0029272736
- M. L. D. Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, G. Majni, P. Mengucci, J. Zemek, and I. N. Mihailescu, Appl. Phys. A: Mater. Sci. Process. 60, 275 (1995).
- (1995) Appl. Phys. A: Mater. Sci. Process , vol.60 , pp. 275
- Giorgi, M.L.D.¹ Leggieri, G.² Luches, A.³ Martino, M.⁴ Perrone, A.⁵ Majni, G.⁶ Mengucci, P.⁷ Zemek, J.⁸ Mihailescu, I.N.⁹

7
- 0028761011
- A. Luches, G. Leggieri, M. Martino, A. Perrone, G. Majni, P. Mengucci, and I. N. Mihailescu, Appl. Surf. Sci. 79, 244 (1994).
- (1994) Appl. Surf. Sci. , vol.79 , pp. 244
- Luches, A.¹ Leggieri, G.² Martino, M.³ Perrone, A.⁴ Majni, G.⁵ Mengucci, P.⁶ Mihailescu, I.N.⁷

8
- 0032677756
- J. D. Wu, J. Sun, X. X. Zhong, Z. Y. Zhou, C. Z. Wu, and F. M. Li, Thin Solid Films 350, 101 (1999).
- (1999) Thin Solid Films , vol.350 , pp. 101
- Wu, J.D.¹ Sun, J.² Zhong, X.X.³ Zhou, Z.Y.⁴ Wu, C.Z.⁵ Li, F.M.⁶

9
- 84916142424
- D. V. Tsu, G. Lucocsky, M. J. Mantini, and S. S. Chao, J. Vac. Sci. Technol. A 5, 1998 (1987).
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 1998
- Tsu, D.V.¹ Lucocsky, G.² Mantini, M.J.³ Chao, S.S.⁴

10
- 0036160276
- I. Umezu, K. Kohno, T. Yamaguchi, A. Sugimura, and M. Inada, J. Vac. Sci. Technol. A 20, 30 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 30
- Umezu, I.¹ Kohno, K.² Yamaguchi, T.³ Sugimura, A.⁴ Inada, M.⁵

11
- 0036470285
- Y. Nakata, J. Marumoto, T. Okada, and M. Maeda, J. Appl. Phys. 91, 1640 (2002).
- (2002) J. Appl. Phys. , vol.91 , pp. 1640
- Nakata, Y.¹ Marumoto, J.² Okada, T.³ Maeda, M.⁴

12
- 0030080397
- Y. Yamada, T. Orii, I. Umezu, S. Takeyama, and T. Yoshida, Jpn. J. Appl. Phys., Part 1 35, 1361 (1996).
- (1996) Jpn. J. Appl. Phys., Part 1 , vol.35 , pp. 1361
- Yamada, Y.¹ Orii, T.² Umezu, I.³ Takeyama, S.⁴ Yoshida, T.⁵

13
- 0037276289
- M. Inada, I. Umezu, and A. Sugimura, J. Vac. Sci. Technol. A 21, 84 (2003).
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 84
- Inada, M.¹ Umezu, I.² Sugimura, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.