Oxide epitaxial lift-off (OELO)

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 365-371

  Eddy, M M ^a   Hanson, R ^a   Rao, M R ^a   Zuck, B ^a   Speck, J S ^a   Tarsa, E J ^a  

^a SUPERCONDUCTOR TECHNOLOGIES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ETCHING; FILM GROWTH; GLASS; HIGH TEMPERATURE SUPERCONDUCTORS; MICROWAVE DEVICES; OXIDE SUPERCONDUCTORS; SEPARATION; STRONTIUM COMPOUNDS; SUBSTRATES; SUPERCONDUCTING FILMS; YTTRIUM COMPOUNDS;

OXIDE EPITAXIAL LIFT OFF (OELO); STRONTIUM TITANATE; YTTRIUM BARIUM COPPER OXIDE;

EPITAXIAL GROWTH;

EID: 0031362618     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-474-365     Document Type: Conference Paper

References (16)