Microscale wear properties of ultrathin diamond-like carbon films

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 6 B, 2000, Pages

  Shimura, Ken ichi ^a   Baba, Kazuhiro ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; ELECTRIC POTENTIAL; INTERDIFFUSION (SOLIDS); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; TRIBOLOGY; ULTRATHIN FILMS; WEAR RESISTANCE;

DIAMOND LIKE CARBON (DLC);

AMORPHOUS FILMS;

EID: 0034205684     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l626     Document Type: Article

References (10)