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Electroanalysis

Volumn 11, Issue 10-11, 1999, Pages 707-711

Design of solid state array for simultaneous potentiometric and impedance sensing in gas phase

(6) Polk, Brian J a Smith, J Anthony a DeWeerth, Stephen P b Zhou, Zhiping a Janata, Jiři a Domansky, Karel c

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

b Georgia Institute of Technology (United States)

c MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Ammonia; Eight solid state sensor array; Gas phase; Impedance sensing

Indexed keywords

CHEMICAL BONDS; CHEMICAL SENSORS; CHIP SCALE PACKAGES; CONDUCTING POLYMERS; FIELD EFFECT TRANSISTORS; GAS DETECTORS; GASES; GOLD; PASSIVATION; SILICON NITRIDE; WORK FUNCTION;

CHEMICAL SENSING; EIGHT SOLID STATE SENSOR ARRAY; ELECTRONIC SERVICES; FEATURE SIZES; GAS-PHASES; IMPEDANCE SENSING; MEASUREMENTS OF; POTENTIOMETRIC SENSING; SENSING CHIP; SENSORS ARRAY;

AMMONIA;

EID: 0000568199 PISSN: 10400397 EISSN: None Source Type: Journal
DOI: 10.1002/(sici)1521-4109(199907)11:10/11<707::aid-elan707>3.0.co;2-3 Document Type: Article

Times cited : (24)

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