Ultrathin Amorphous Carbon Overcoats by Filtered Cathodic Arc Deposition

IEEE Transactions on Magnetics

Volumn 39, Issue 5 I, 2003, Pages 2201-2204

  Yamamoto, Takayuki ^a,b   Hyodo, Hiroyuki ^a   Tsuchitani, Shigeki ^c   Kaneko, Reizo ^c  

^a FUJITSU LABORATORIES LTD   (Japan)

^b TOSHIBA CORPORATION   (Japan)

^c WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Corrosion resistance; Durability; Filtered cathodic arc deposition; Overcoat; Tetrahedral amorphous carbon

Indexed keywords

CORROSION RESISTANCE; DOPING (ADDITIVES); HARDNESS; LUBRICANTS;

CATHODIC ARC DEPOSITION;

AMORPHOUS MATERIALS;

EID: 0141987507     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2003.817065     Document Type: Article

References (11)

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