Effect of N doping on structure and properties of DLC films produced by plasma beam deposition

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 1786-1788

  Yen, Bing K ^a   Thiele, Jan Ulrich ^a   Geisler, Michael ^d   Kasai, Paul H ^a   White, Richard L ^b   York, Brian R ^b   Zadoori, Henrik ^b   Kellock, Andrew J ^a   Tang, Wade C ^c   Wu, Tsai Wei ^a   Toney, Michael F ^a   Marchon, Bruno ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

^c New Focus Inc ^*  (United States)

^d Balzers Process Systems   (Germany)

Author keywords

Density; Diamond like carbon; Plasma beam deposition; Protective coating

Indexed keywords

DEPOSITION; DOPING (ADDITIVES); ELECTRONIC DENSITY OF STATES; HARDNESS; ION BEAMS; NITROGEN; PLASMA APPLICATIONS; PROTECTIVE COATINGS;

PLASMA BEAM DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 0035386553     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.950968     Document Type: Article

References (13)

1. Magnetic hard disk overcoats in the 3-5 nm thickness range
2. Performance of hard DLC protective film prepared by PECVD method for thin film magnetic disk
3. Preparation and properties of highly tetrahedral hydrogenated amorphous carbon
4. Investigation of hard a-C:H layers generated by a novel r.f. plasma beam source
5. Durability and structure of rf sputtered carbon-nitrogen thin film overcoats on rigid disks of magnetic thin film media
6. Measurements of carbon thin films using X-ray reflectivity
7. Carbon overcoat: Structure and bonding of Z-DOL
8. Interpretation of Raman spectra of disordered and amorphous carbons
9. Adsorption of perfluoropolyethers on carbon surfaces
10. Structure and bonding of hydrocarbon plasma generated carbon films: An electron energy loss study
11. Mechanical strength and wear resistance of 5 nm IBD carbon overcoats for magnetic disks