Fabrication of photoresist microlens arrays

Proceedings of the 10th International Conference on Microelectronics, ICM 1998

Volumn 1998-December, Issue , 1998, Pages 49-52

  Alhokail, Hamad S ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROELECTRONICS; MICROOPTICS; OPTICAL INSTRUMENT LENSES; PHOTORESISTS;

MICRO-LENS ARRAYS; PROCESSING FACTORS;

MICROLENSES;

EID: 85005831701     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICM.1998.825565     Document Type: Conference Paper

References (6)

1. Daly, D., Stevens, KF., Hutley, and M.C., Davies, N., 1990, The manufacture of microlenses by melting photoresist, Measurements Science. Technology, 1.
2. Gale. M.T. and hop, K, 1983.The fabrication of fine lens arrays by laser beam writing, SPIIE, 3 98.
3. Ishihara, Y., and Tanigaki K, Sept. 1983. A high photosensitivity ILCCD Image Sensor nitb monolithic resin lens array, Proc. International Electron Device Meeting.
4. Oikawa, M., and Iga, K, 1982.Distriboted-index planar microlens, Applied Optics, 2 1.
5. Popovic, Z.D.,Sp xague, R-A. and Neville Connell, G.A, 1988, Technique for monolithic fabrication of microlens arrays, Applied Optics, V.27, n. 7.
6. Shimada, J., Ohguchi O. and Sawada R 1991, Microlens Fabricated by the Planar Process, Journal of lightwave technology, V.9, n. 5.