Fabrication of hybrid sol-gel glass diffractive elements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3620, Issue , 1999, Pages 212-218

  Rantala, J T ^a   Ayras, P ^a   Levy, R ^a   Descour, M R ^a   Honkanen, S ^a   Peyghambarian, N ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS TRANSITION; LITHOGRAPHY; OPTICAL GLASS; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES; SILICON COMPOUNDS; SOL-GELS; SURFACE ROUGHNESS; TEMPERATURE; ULTRAVIOLET RADIATION;

BINARY PHASE ZONE PLATES; DIFFRACTIVE LENS ARRAYS; DIFFRACTIVE OPTICAL ELEMENTS; HYBRID SOL GEL MATERIALS; ULTRAVIOLET LITHOGRAPHY PROCESSING;

DIFFRACTIVE OPTICS;

EID: 0032652825     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.343732     Document Type: Conference Paper

References (18)