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Volumn 148, Issue 11, 2001, Pages

Theoretical Analysis of the Baking Process in Two Polymer/Solvent Systems: PMMA/Anisole and PMDA-ODA/NMP

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0141910253     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1406495     Document Type: Article
Times cited : (3)

References (27)
  • 1
    • 0004093537 scopus 로고
    • Chap. 4, L. F. Thompson, C. G. Wilson, and M. J. Bowden, Editors, American Chemical Society, Washington, DC
    • L. F. Thompson, in Introduction to Microlithography, 2nd ed., Chap. 4, L. F. Thompson, C. G. Wilson, and M. J. Bowden, Editors, American Chemical Society, Washington, DC (1994).
    • (1994) Introduction to Microlithography, 2nd Ed.
    • Thompson, L.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.