Study of bake mechanisms by real-time in-situ ellipsometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3333, Issue , 1998, Pages 289-300

  Paniez, Patrick J ^a   Vareille, Aime ^a   Ballet, Patrice ^a   Mortini, Benedicte P ^b  

^a ORANGE LABS   (France)

^b STMICROELECTRONICS   (Italy)

Author keywords

Bake; Compaction; Film formation; In situ ellipsometry; Polymer; Relaxation; Resist

Indexed keywords

COMPACTION; ELLIPSOMETRY; POLYMERS;

BAKE; FILM FORMATION; IN-SITU ELLIPSOMETRY; RELAXATION; RESIST;

POLYMER FILMS;

EID: 0001313186     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.312418     Document Type: Conference Paper

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