Micro IC probe for LSI testing

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 263-266

  Ito, Takahiro ^a   Sawada, Renshi ^a   Higurashi, Eiji ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; INTEGRATED CIRCUIT TESTING; LSI CIRCUITS; MICROMACHINING;

CONTACT RESISTANCE;

MICROSENSORS;

EID: 0032634383     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746830     Document Type: Conference Paper

References (5)