SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5038 I, Issue , 2003, Pages 493-495

Making carbon nanotube probes for high aspect ratio scanning probe metrology

(7) Emirov, Y N a Beerbom, M a Walters, D A b Ren, Z F c Huang, Z P d Rossie, B B e Schlaf, R a

a University of South Florida (United States)

b UNIVERSITY OF CENTRAL FLORIDA (United States)

c BOSTON COLLEGE (United States)

d NanoLab Inc (United States)

e UNIVERSITY OF SOUTH FLORIDA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; ION BEAM ASSISTED DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING;

CATALYST FILMS; FOCUS ION BEAM PATTERNING; HIGH ASPECT RATIO CRITICAL DIMENSIONING METROLOGY;

PROBES;

EID: 0141723655 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.483759 Document Type: Conference Paper

Times cited : (5)

References (8)

1
- 0034905469
- J.H. Hafner, C.L. Cheung, A.T. Woolley and C.M. Lieber: Prog. Biophys. Mol. Biol. 77 (1), pp. 73-110 (2001).
- (2001) Prog. Biophys. Mol. Biol. , vol.77 , Issue.1 , pp. 73-110
- Hafner, J.H.¹ Cheung, C.L.² Woolley, A.T.³ Lieber, C.M.⁴

2
- 0035442319
- C.V. Nguyen, K.J. Chao, R.M.D. Stevens, L. Delzeit, A. Cassell, J. Han and M. Meyyappan: Nanotechnology 12 (3), pp.363-367 (2001).
- (2001) Nanotechnology , vol.12 , Issue.3 , pp. 363-367
- Nguyen, C.V.¹ Chao, K.J.² Stevens, R.M.D.³ Delzeit, L.⁴ Cassell, A.⁵ Han, J.⁶ Meyyappan, M.⁷

3
- 0000440237
- R. Stevens, C. Nguyen, A. Cassell, L. Delzeit, M. Meyyappan and J. Han: Appl. Phys. Lett. 77 (21), pp.3453-3455 (2000).
- (2000) Appl. Phys. Lett. , vol.77 , Issue.21 , pp. 3453-3455
- Stevens, R.¹ Nguyen, C.² Cassell, A.³ Delzeit, L.⁴ Meyyappan, M.⁵ Han, J.⁶

4
- 0001058973
- G. Nagy, M. Levy, R. Scarmozzino, R.M. Osgood, H. Dai, R.E. Smalley, C.A. Michaels, G.W. Flynn and G.F. McLane: Appl. Phys. Lett. 73 (4), pp.529-531 (1998).
- (1998) Appl. Phys. Lett. , vol.73 , Issue.4 , pp. 529-531
- Nagy, G.¹ Levy, M.² Scarmozzino, R.³ Osgood, R.M.⁴ Dai, H.⁵ Smalley, R.E.⁶ Michaels, C.A.⁷ Flynn, G.W.⁸ McLane, G.F.⁹

5
- 0035522064
- J.G. Wen, Z.P. Huang, D.Z. Wang, J.H. Chen, S.X. Yang, Z.F. Ren, J.H. Wang, L.E. Calvet, J. Chen, J.F. Klemic and M.A. Reed: Journal of Materials Research 16 (11), pp.3246-3253 (2001).
- (2001) Journal of Materials Research , vol.16 , Issue.11 , pp. 3246-3253
- Wen, J.G.¹ Huang, Z.P.² Wang, D.Z.³ Chen, J.H.⁴ Yang, S.X.⁵ Ren, Z.F.⁶ Wang, J.H.⁷ Calvet, L.E.⁸ Chen, J.⁹ Klemic, J.F.¹⁰ Reed, M.A.¹¹

6
- 0035449396
- Z.F. Ren, Z.P. Huang, D.Z. Wang, W.Z. Li, J.G. Wen, S.X. Yang, Yi, Tu and J.H. Chen: Sampe J. 37 (5), pp.64-67 (2001).
- (2001) Sampe J. , vol.37 , Issue.5 , pp. 64-67
- Ren, Z.F.¹ Huang, Z.P.² Wang, D.Z.³ Li, W.Z.⁴ Wen, J.G.⁵ Yang, S.X.⁶ Yi, T.⁷ Chen, J.H.⁸

7
- 0141618921
- R. Schlaf, Y. Emirov, J.A. Bieber, A. Sikder, J. Kohlscheen, D.A. Walters, M.R. Islam, B. Metha, Z.F. Ren, T.L. Shofner, B.B. Rossie and M.W. Cresswell: Proc. SPIE Vol. 4689 pp.53-57 (2002).
- (2002) Proc. SPIE , vol.4689 , pp. 53-57
- Schlaf, R.¹ Emirov, Y.² Bieber, J.A.³ Sikder, A.⁴ Kohlscheen, J.⁵ Walters, D.A.⁶ Islam, M.R.⁷ Metha, B.⁸ Ren, Z.F.⁹ Shofner, T.L.¹⁰ Rossie, B.B.¹¹ Cresswell, M.W.¹²

8
- 0001441266
- Z.F. Ren, Z.P. Huang, D.Z. Wang, J.G. Wen, J.W. Xu, J.H. Wang, L.E. Calvet, J. Chen, J.F. Klemic and M.A. Reed: Appl. Phys. Lett. 75 (8), pp.1086-1088 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , Issue.8 , pp. 1086-1088
- Ren, Z.F.¹ Huang, Z.P.² Wang, D.Z.³ Wen, J.G.⁴ Xu, J.W.⁵ Wang, J.H.⁶ Calvet, L.E.⁷ Chen, J.⁸ Klemic, J.F.⁹ Reed, M.A.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.