Analysis of imaging performance degradation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 131-138

  Matsumoto, Koichi ^a   Matsuyama, Tom ^a   Hirukawa, Shigeru ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Birefringence; CD control; Flare; Wavefront aberration; Zernike polynomials

Indexed keywords

ABERRATIONS; BIREFRINGENCE; COMPUTER SIMULATION; EXCIMER LASERS; OPTICAL DESIGN; OPTICS; PHOTOLITHOGRAPHY; POLYNOMIALS; WAVEFRONTS;

CHROMATIC ABERRATION; CRITICAL DIMENSION CONTROL; FLARE; WAVEFRONT ABERRATION; ZERNIKE POLYNOMIAL;

IMAGE ANALYSIS;

EID: 0141722496     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485465     Document Type: Conference Paper

References (8)

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