VHDL-AMS modelling and simulation of a planar electrostatic micromotor

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 580-590

  Endemano A ^a   Fourniols, J Y ^b   Camon, H ^b   Marchese, A ^b   Muratet, S ^b   Bony, F ^b   Dunnigan, M ^a   Desmulliez, M P Y ^a   Overton, G ^c  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b LAAS CNRS   (France)

^c MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; HIGH LEVEL LANGUAGES; MATHEMATICAL MODELS;

ELECTROSTATIC MICROMOTOR; SYSTEM LEVEL SIMULATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0141718832     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/308     Document Type: Article

References (48)

1. Senturia S D 1998 Simulation and design of microsystems: a 10-year perspective Sensors Actuators A 67 1-7
2. Fedder G K and Jing Q 1999 A hierarchical circuit-level design methodology for microelectromechanical systems IEEE Trans. Circuits Syst. II 46 1309-15
3. Dewey A and Fair R 1998 Microelectromechanical systems (MEMS) design and design automation research at Duke University Proc. Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators (MSM 98) (Santa Clara, CA, 6-8 April 1998) pp 174-9
4. Maseeh F, Harris R M and Senturia S D 1990 A CAD architecture for microelectromechanical systems Proc. IEEE Micro Electro Mechanical Systems (Feb. 1990) pp 44-9
5. Damnjanovic M, Dimic Z, Litovski V and Glozic D 1995 Hardware description languages for ALECSIS simulator Proc. 20th Int. Conf. on Microelectronics vol 2 pp 525-8
6. Crary S and Zhang Y 1990 CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems MEMS 90 (Institute of Electrical Engineers, 1990) pp 113-5
7. Beerschwinger U, Milne N G, Yang S J, Reuben R L, Sangster A J and Ziad H 1994 Coupled electrostatic and mechanical FEA of a micromotor J. Microelectromech. Syst. 3
8. Wiak S, Di Barba P and Savini A 1995 3-D computer aided analysis of the 'Berkeley' electrostatic micromotor IEEE Trans. Magn. 31 2108-11
9. Milne N G, Jang S J, Sangster A J, Ziad H and Spirkovitch S 1993 Determination of the forces present in an electrostatic micromotor Proc. 6th Int. Conf. on Machines and Drives (Oxford, Sept. 1993) pp 9-14
10. Dufour I, Sarraute E S and Abbas A 1996 Optimization of the geometry of electrostatic micromotors using only analytical equations J. Micromech. Microeng. 6 108-11
11. Sangster A J and Samper V D 1997 Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor J. Microelectromech. Syst. 6
12. Beerschwinger U, Reuben R L and Yang S 1997 Frictional study of micromotor bearings Sensors Actuators A 63 229-41
13. IEEE Standard VHDL Analog nad Mixed-Signal Extensions 1999 IEEE Manual
14. Christen E and Bakalar K 1999 VHDL-AMS-A hardware description language for analog and mixed-signal applications IEEE Trans. Circuits Syst. II 46 1263-72
15. Damon D and Christen E 1996 Introduction to VHDL-AMS: part 1. Structural and discrete time concepts Proc. 1996 Int. Symp. on Computer-aided Control System Design (Dearborn, MI, Sept. 1996) pp 264-9
16. Christen E and Damon D 1996 Introduction to VHDL-A: part 2. Continuous and mixed continuous/discrete concepts Proc. 1996 Int. Symp. on Computer-aided Control System Design (Dearborn, MI, Sept. 1996) pp 270-5
17. Moser E and Mittwollen N 1998 VHDL-AMS: the missing link in system design-experiments with unified modelling in automotive engineering Proc. 1998 Design Automation and Test in Europe (DATE 98)
18. Conédéra V, Fabre N, Camon H, Rousset B, Pham H H and Solano B 1995 First steps towards the fabrication of electrostatics micromotors using SOG Sensors Actuators A 46-47 82-4
19. Müller R S 1990 Microdynamics Sensors Actuators A21-A23 1-8
20. Trimmer W S N and Gabriel K J 1987 Design considerations for a practical electrostatic micro-motor Sensors Actuators 11 189-206
21. Fujita H and Omodaka A 1987 Electrostatic actuators for micromechatronics Proc. IEEE Micro Robots and Teleoperators Workshop (Nov. 1987)
22. Tai Y C, Fan L S and Muller R S 1989 IC-processed micro-motors: design, technology, and testing IEEE Workshop on Micro Electro Mechanical Systems (Feb. 1989)
23. Lang J H, Schlecht M F and Howe R T 1987 Electric micromotors: electromechanical characteristics Proc. IEEE Micro Robots and Teleoperators Workshop (Nov. 1987)
24. Mehregany M, Nagarkar P, Senturia S D and Lang J H 1990 Operation of microfabricated harmonic and ordinary side-drive motors Proc. IEEE Micro Electro Mechanical Systems (Feb. 1990)
25. Houzego P J 1991 Electrostatic micromotors Proc. 8th Int. Conf. Electrostatics 1991 (Oxford, UK, April 1991) vol 118 pp 2810-2
26. Mehregany M, Bart S F, Tavrow L S, Lang J H, Senturia S D and Schlecht M F 1990 A study of three microfabricated variable-capacitance motors Transducers'89, Proc. 5th Int. Conf. on Solid-State Sensors and Actuators and Eurosensors III (June 1990) vol 2 pp 173-9
27. Dhuler V R, Mehregany M and Phillips S M 1993 An experimental technique and a model for studying the operation of harmonic side-drive micromotors IEEE Trans. Electron Devices 40 1977-84
28. Sarraute E, Lefevre Y and Lajoie-Mazenc M 1994 Modelisation and simulation of the dynamics of variable capacitance micro motors ICEM 94, Int. Conf. on Electrical Machines. Soc. Electr. Electron (Paris, France, 1994) vol 2 pp 305-10
29. Dufour I, Sarraute E, Francais O and Abbas A 1997 Simulation of self-control of an electrostatic micromotor for an intravascular echographic system Sensors Actuators A 62 748-51
30. Endemaño A, Desmulliez M P Y and Dunnigan M 2002 System level simulation of a double stator wobble electrostatic micromotor Sensors Actuators A 99/3 312-20
31. Trimmer W and Jebens R 1989 Harmonic electrostatic motors Sensors Actuators 20 17-24
32. Salman A, Napieralski A and Jablonski G 1999 Simulation and optimization of variable capacitance (VC) micromotors, using modified parallel-plate model Proc. 1999 Int. Conf. on Modeling and Simulation of Microsystems (MSM'99) (San Juan, Puerto Rico, USA 19-21 April 1999)
33. Omar M P, Mehregany M and Mullen R L 1992 Electric and fluid field analysis of side-drive micromotors J. Microelectromech. Microsyst. 1
34. Deng K, Ramanathan G P and Mehregany M 1994 Micromotor dynamics in lubricating fluids J. Micromech. Microeng. 4 266-9
35. Bart S F, Mehregany M, Tavrow L S, Lang J H and Senturia S D 1990 Measurements of electric micromotor dynamics Microstruct. Sensors Actuators DSC 19 19-29
36. Bart S F, Mehregany M, Tavrow L S, Lang J H and Senturia S D 1992 Electric micromotor dynamics IEEE Trans. Electron Devices 39 566-75
37. Romanovicz B, Lerch Ph, Renaud Ph and Vachoux A 1995 Modelling and simulation of microsystems an experience with HDL-A Workshop on Libraries, Component Modeling and Quality Assurance (IRESTE-IHT, Nantes, France, 26-27 April 1995)
38. Romanovicz B 1998 Methodology for the modeling and simulation of microsystems (Dordrecht: Kluwer)
39. Dewey A, Dussault H, Hanna J, Christen E, Fedder G, Romanovicz B and Maher M 1999 Energy-based characterization of microelectromechanical systems (MEMS) and component modeling using VHDL-AMS Proc. Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators (MSM 99) (San Juan, Puerto Rico, 19-21 April 1999)
40. Voigt P, Schrag G and Wachutka G 1998 Microfluidic system modeling using VHDL-AMS and circuit simulation Microelectron. J. 29 791-7
41. Schwarz P 2000 Physically oriented modeling of heterogeneous systems Math. Comput. Simul. 53 333-44
42. Gaffiot E and Vuorinen K H K 1999 Behavioral modeling for hierarchical simulation of optronic systems IEEE Trans. Circuits Syst. II 46
43. Oudinot J, Hui-Bon-Hoa C, Lemery F and Rossi A Validation of a new methodology using VHDL-AMS on a hard-disk drive design Deep Submicron Technical Publication (Wilsonville, OR: Mentor Graphics Corporation)
44. Aubert V and Garcia-Sabiro S 2000 Common rail injection system described in VHDL-AMS and simulated with ADVance MS™ Deep Submicron Technical Publication (Wilsonville, OR: Mentor Graphics Corporation)
45. Dewey A, Hanna J, Hillman B, Dussault H, Fedder G, Christen E, Bakalar K, Carter H and Romanovicz B F VHDL-AMS modeling considerations and styles for composite systems version 2.0., Duke University webpage HTTP: http://www.ee.duke.edu/research/IMPACT/documents/model_g.pdf.
46. ADVanceMS User Documentation 1999
47. Yasseen A A, Mitchell J N, Klemic J F, Smith D A and Mehregany M 1999 A rotary electrostatic micromotor 1 × 8 optical switch IEEE J. Sel. Top. Quantum Electron. 5
48. Yasseen A A, Mitchell J N, Smith D A and Mehregany M 1999 High aspect ratio rotary polygon micromotor scanners Sensors Actuators A 77 73-9