Effects of diffusion on interfacial fracture of gold-chromium hybrid microcircuit films

International Journal of Fracture

Volumn 120, Issue 1-2, 2003, Pages 407-419

  Moody, N R ^a   Adams, D P ^b   Medlin, D ^a   Headley, T ^b   Yang, N ^a   Volinsky, A ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c MOTOROLA INC   (United States)

Author keywords

Gold films; Gold chromium films; Interfacial fracture; Nanoindentation; Stressed overlayers

Indexed keywords

ADHESIVES; GOLD; INDENTATION; SPUTTER DEPOSITION; SURFACE CHEMISTRY;

INTERFACIAL FRACTURE;

FRACTURE;

FILM; FRACTURE;

EID: 0141705746     PISSN: 03769429     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1024979829573     Document Type: Article

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