New PTB reflectometer for the characterization of large optics for the extreme ultraviolet spectral region

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4688, Issue 1, 2002, Pages 338-347

  Tümmler, Johannes ^a   Scholze, Frank ^a   Brandt, Guido ^a   Meyer, Bernd ^a   Scholz, Frank ^a   Vogel, Katrin ^a   Ulm, Gerhard ^b   Poier, Michael ^b   Klein, Udo ^b   Diete, Wolfgang ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b ACCEL Instruments GmbH   (Germany)

Author keywords

At wavelength characterization; Extreme ultraviolet; Lithography; Metrology; Reflectometry; Synchrotron radiation

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; LIGHT REFLECTION; MIRRORS; PHOTOLITHOGRAPHY; RADIOMETRY; REFLECTOMETERS; SYNCHROTRON RADIATION;

OPTICAL COMPONENTS;

ULTRAVIOLET RADIATION;

EID: 0141681672     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472307     Document Type: Article

References (10)

1. M. Krumrey, M. Kühne, P. Müller, and F. Scholze, "Precision soft x-ray reflectometry of curved multilayer optics, " Proc. SPIE 1547, pp. 136 - 143, 1992.
2. D. Fuchs, S. Kraft, F. Scholze, and G. Ulm, "Soft X-Ray Detector Calibration and Reflectometry Facilities of the PTB at BESSY, " in: J. Thieme, G. Schmahl, D. Rudolph, and E. Umbach (Eds.) "X-Ray Microscopy and Spectroscopy, " pp. 1-187 to 1-191, Springer Verlag, Berlin, 1998.
3. F. Scholze, G. Brandt, B. Meyer, P. Müller, F. Scholz, J. Tümmler, K. Vogel, and G. Ulm, "High-accuraccy detector calibration for EUV metrology at PTB, " Proc. SPIE 4688, 2002.
4. M. Kühne, K. Danzmann, P. Müller, B. Wende, N. Ceglio, D. Stearns, and A. Hawryluk, "Characterization of multilayer structures for soft x-ray laser research, " Proc. SPIE 688, pp. 76 - 80, 1986.
5. D. Fuchs, M. Krumrey, P. Müller, F. Scholze, and G. Ulm, "High precision soft x-ray reflectometer, " Rev. Sci. Instrum. 66, pp. 2248 - 2250, 1994.
6. C. Tarrio, T. Lucatorto, S. Grantham, M. Squires, U. Arp, and L. Deng, "Upgrade to the NIST/DARPA EUV reflectometry facility, " Proc. SPIE 4506, pp. 32 - 38, 2001.
7. F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, A. Gottwald, R. Klein, B. Meyer, U. Schwarz, R. Thornagel, J. Tümmler, K. Vogel, J. Weser, and G. Ulm, "High-accuracy EUV metrology of PTB using synchrotron radiation, " Proc. SPIE 4344, pp. 402 - 413, 2001.
8. E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, "Recent developments in EUV reflectometry at the Advanced Light Source, " Proc. SPIE 4343, pp. 363 - 373, 2001.
9. M. Wedowski, J. H. Underwood, E. M. Gullikson, S. Bajt, J. A. Folta, P. A. Kearney, C. Montcalm, and E. A. Spiller, "High-precision reflectometry of multilayer coatings for extrem ultraviolet lithography, " Proc. SPIE 3997, pp. 83 -93, 2000.
10. E. Gullikson, F. Scholze, and J. Tümmler, private communication.