Some challenges in white light phase shifting interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 118-127

  Schmit, Joanna ^a   Olszak, Artur G ^a  

^a Veeco Metrology   (United States)

Author keywords

Dispersion error; Phase shifting interferometry; Scanner error; White light interferometry; White light phase shifting interferometry

Indexed keywords

ABERRATIONS; ALGORITHMS; LIGHT INTERFERENCE; OPTICAL SYSTEMS; PHASE SHIFT; SCANNING;

WHITE LIGHT PHASE SHIFTING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0036421091     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472211     Document Type: Conference Paper

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