Electronic stopping of He, B, N, and Al in SiC

Applied Physics Letters

Volumn 83, Issue 8, 2003, Pages 1665-1667

  Zhang, Y ^a   Weber, W J ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BORON; ENERGY GAP; HELIUM; NITROGEN; SEMICONDUCTOR MATERIALS;

ELECTRONIC STOPPING;

SILICON CARBIDE;

EID: 0043283898     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1604473     Document Type: Article

References (21)

1. W. Wesch, Nucl. Instrum. Methods Phys. Res. B 116, 305 (1996).
2. J. B. Casady and R. W. Johnson, Solid-State Electron. 39, 1409 (1996).
3. C. Raynaud, J. Non-Cryst. Solids 280, 1 (2001).
4. Y. Zhang, W. J. Weber, W. Jiang, A. Hallén, and G. Possnert, Nucl. Instrum. Methods Phys. Res. B 195, 320 (2002).
5. Y. Zhang, G. Possnert, and W. J. Weber, Appl. Phys. Lett. 80, 4662 (2002).
6. Y. Zhang, Nucl. Instrum. Methods Phys. Res. B 196, 1 (2002).
7. J. F. Ziegler, SRIM-2000 and SRIM 2003, http://www.srim.org
8. J. E. E. Baglin and J. F. Ziegler, J. Appl. Phys. 45, 1413 (1974).
9. J. F. Ziegler and J. M. Manoyan, Nucl. Instrum. Methods Phys. Res. B 35, 215 (1988).
10. L. Leblanc, G. G. Ross, P. A. Gollier, and P. Bertrand, Nucl. Instrum. Methods Phys. Res. B 111, 17 (1996).
11. L. Leblanc and G. G. Ross, Nucl. Instrum. Methods Phys. Res. B 118, 19 (1996).
12. R. Kreutz, W. Neuwirth, and W. Pietsh, Phys. Rev. A 22, 2606 (1980).
13. J. T. Park and E. J. Zimmerman, Phys. Rev. 131, 1611 (1963).
14. C. A. Sautter and E. J. Zimmerman, Phys. Rev. 140, A490 (1965).
15. W. Neuwith, W. Pietsh, and R. Kreutz, Nucl. Instrum. Methods Phys. Res. 149, 105 (1978).
16. A. S. Lodhi and D. Powers, Phys. Rev. A 10, 2131 (1974).
17. P. Bauer, Nucl. Instrum. Methods Phys. Res. B 45, 673 (1990).
18. C. Tshalär and H. Bichel, Phys. Rev. 175, 476 (1968).
19. P. D. Bourland and D. Powers, Phys. Rev. B 3, 3635 (1971).
20. D. I. Thwaites, Nucl. Instrum. Methods Phys. Res. B 27, 293 (1987).
21. W. H. Bragg and R. Kleeman, Philos. Mag. 10, 318 (1905).