Measured stopping cross sections for hydrogen in a-SixC1-x: H ternary compounds near their maximum values

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 19-23

  Leblanc, L ^a   Ross, G G ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BONDING; CALCULATIONS; EFFECTS; HYDROGEN; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; TARGETS;

AMORPHOUS HYDROGENATED SILICON CARBIDE COMPOUNDS; BRAGG RULE; STOPPING CROSS SECTIONS;

PARTICLE BEAM DYNAMICS;

EID: 0030565181     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583x(96)01121-4     Document Type: Article

References (28)

1. J.F. Ziegler and J.M. Manoyan, Nucl. Instr. and Meth. B 35 (1988) 215.
2. D.I. Thwaites, Nucl. Instr. and Meth. B 69 (1992) 53.
3. W.H. Bragg and R. Kleeman, Philos. Mag. 10 (1905) 318.
4. D. Powers, A.S. Lodhi, W.K. Lin and H.L. Cox, Thin Solids Films 19 (1973) 205.
5. W. Neuwirth, W. Pietsch and R. Kreutz, Nucl. Instr. and Meth. 149 (1978) 105.
6. C. Tschalär and H. Bichel, Phys. Rev. 175 (1968) 476.
7. P. Bauer, W. Rössler and P. Mertens, Nucl. Instr. and Meth. B 69 (1992) 53.
8. S. Boily, M. Chaker, H. Pépin, T. Kerdja, J. Voyer, A. Jean, J.C. Kieffer, P. Leung, F. Cerrina and G. Wells, J. Vac. Sci. Technol. B 9 (1991) 3254.
9. G.G. Ross and L. Leblanc, Nucl. Instr. and Meth. B 62 (1992) 484.
10. G.G. Ross, L. Leblanc, B. Terreault, J.F. Pageau and P.A. Gollier, Nucl. Instr. and Meth. B 66 (1992) 17.
11. L. Leblanc and G.G. Ross, Nucl. Instr. and Meth. B 90 (1994) 54.
12. L. Leblanc and G.G. Ross, Nucl. Instr. and Meth. B 95 (1995) 457.
13. P. Sigmund and K.B. Winterbon, Nucl. Instr. and Meth. 119 (1974) 541.
14. P. Børgesen and M.-A. Nicolet, Nucl. Instr. and Meth. 140 (1977) 541.
15. D. Semrad and P. Bauer, Nucl. Instr. and Meth. 149 (1978) 159.
16. ICRU Report 49, Stopping Powers and Ranges for Protons and Alpha Particles, Maryland, USA, 1993.
17. S. Matteson, E.K.L. Chau and D. Powers, Phys. REv. A 14 (1900) 169.
18. J.E.E. Baglin and J.F. Ziegler, J. Appl. Phys. 45 (1974) 1413.
19. M.A. El Khakani, M. Chaker, A. Jean, S. Boily, H. Pepin, J.C. Kieffer and S.C. Gujrathi, J. Appl. Phys. 74 (1993).
20. P. Paduschek, C.H. Höpel and H. Mitlehner, Thin Solid Films 110 (1983) 291.
21. E. Gat, M.A. El Khakani, M. Chaker, A. Jean, S. Boily, H. Pepin, J.C. Kieffer, J. Durand, B. Cros, F. Rousseux and S. Gujrathi, J. Mat. Res. 7 (1992) 2478.
22. A. Papadopoullos, master's thesis, INRS-Énergie et Matériaux, 1993.
23. P. Bauer, Nucl. Instr. and Meth. B 45 (1990) 673.
24. D.I. Thwaites, Nucl. Instr. and Meth. B 27 (1987) 293.
25. D.I. Thwaites, Nucl. Instr. and Meth. B 12 (1985) 84
26. J.R. Sabin and J. Oddershede, Nucl. Instr. and Meth. B 27 (1987) 280.
27. J. Oddershede and J.R. Sabin, Nucl. Instr. and Meth. B 42 (1989) 7.
28. D. Boutard, W. Möller and B.M.U. Scherzer, Phys. Rev. B 38 (1900) 2988.