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Thin Solid Films

Volumn 408, Issue 1-2, 2002, Pages 128-131

Novel synthesis route to conductive antimony-doped tin dioxide and micro-fabrication method

(3) Kololuoma, Terho a Kärkkäinen, Ari H O a Rantala, Juha T b

a VTT TECHNICAL RESEARCH CENTRE OF FINLAND (Finland)

b GuideOptics Oy (Finland)

Author keywords

Antimony doped tin dioxide; Electrical properties; Optical properties; Photopatterning

Indexed keywords

ANTIMONY; CRYSTALLIZATION; CRYSTALLOGRAPHY; ELECTRIC CONDUCTIVITY; FREE RADICAL POLYMERIZATION; METALLIC FILMS; REFRACTIVE INDEX; SEMICONDUCTOR DOPING; SYNTHESIS (CHEMICAL); TIN COMPOUNDS;

PHOTOPATTERNING;

THIN FILMS;

EID: 0037012536 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00122-0 Document Type: Article

Times cited : (7)

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