Characterization of MEMS structures by microscopic digital holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4945, Issue , 2002, Pages 71-78

  Coppola, Giuseppe ^a   De Nicola, Sergio ^a   Ferraro, Pietro ^a   Finizio, Andrea ^a   Grilli, Simonetta ^b   Iodice, Mario ^a   Magro, Carlo ^c   Perattini, Giovanni ^a  

^a CNR   (Italy)

^b ISTITUTO NAZIONALE DI OTTICA   (Italy)

^c STMICROELECTRONICS   (Italy)

Author keywords

Digital holography; Interferometry; MEMS characterization

Indexed keywords

CHARGE COUPLED DEVICES; GEOMETRY; HOLOGRAMS; HOLOGRAPHY; INTERFEROMETERS; INTERFEROMETRY; MATHEMATICAL MODELS;

DIGITAL HOLOGRAPHY; MACH-ZEHNDER INTERFEROMETER; PIEZO-ACTUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0043064078     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.471989     Document Type: Conference Paper

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