Effect of ion energy and ion current on the synthesis of c-BN films by r.f. plasma CVD

Physica Status Solidi (A) Applied Research

Volumn 198, Issue 1, 2003, Pages 111-120

  Deb, B ^a   Roy, R K ^a   Pal, A K ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; FILMS; ION BOMBARDMENT; IONIC STRENGTH; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

ENERGETIC IONS; FILM QUALITY; ION CURRENT; ION ENERGY; PRECURSOR GASES; RADICALS BOMBARDING;

BORON COMPOUNDS;

EID: 0043010997     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306452     Document Type: Article

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