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Thin Solid Films

Volumn 408, Issue 1-2, 2002, Pages 1-5

Electron microscopic analysis of cubic boron nitride films deposited on fused silica

(3) Weissmantel E a Pfeifer, Th a Richter, F a

a CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

Boron nitride; Transmission electron microscopy (TEM)

Indexed keywords

CUBIC BORON NITRIDE; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FUSED SILICA; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CUBIC PHASES;

THIN FILMS;

EID: 0037012532 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00092-5 Document Type: Article

Times cited : (11)

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