Fabrication of microlens arrays by reactive ion milling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 150-155

  Sankur, Haluk O ^a   Hall, Randolph L ^a   Motamedi, M Edward ^a   Gunning, William J ^a   Tennant, William E ^a  

^a ROCKWELL SCIENCE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROLENS ARRAYS; REACTIVE ION MILLING;

ARRAYS; EROSION; FABRICATION; ION BEAMS; MICROMACHINING; PHOTORESISTS; QUARTZ; SPUTTERING;

LENSES;

EID: 0029694858     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)