Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 153-154

  Sawada, R ^a   Yamaguchi, J ^a   Higurashi, E ^a   Shimizu, A ^a   Yamamoto, T ^a   Takeuchi, N ^a   Uenishi, Y ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Collimators; Crystallization; Electrodes; Fluctuations; Micromechanical devices; Mirrors; Optical arrays; Optical switches; Springs; Stability

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; CRYSTALLIZATION; ELECTRODES; MIRRORS; MOEMS; OPTICAL COLLIMATORS; OPTICAL SWITCHES; SINGLE CRYSTALS; SPRINGS (COMPONENTS); TORSIONAL STRESS;

FLUCTUATIONS; HIGH ASPECT RATIO; MICROMECHANICAL DEVICE; MIRROR SIZE; OPTICAL ARRAYS; SINGLE-CRYSTALLINE; TORSION SPRINGS;

ASPECT RATIO;

EID: 84946202452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233512     Document Type: Conference Paper

References (5)

1. J. A. Walker, Topical Review The future of MEMS in telecommunications networks, J. Micromech. Microeng., Vol.10 (2000)R1-R7.
2. D. J. Bishop, C. R. Giles, and S. R. Das, IEEE Microwave and Guided Wave Lett., Vol. 8(1998)269-271.
3. R. Sawada, E. Higurashi, A. Shimizu and T. Maruno, Single Crystalline Mirror Actuated Electrostatically by Terraced Electrodes With High-Aspect Ratio Torsion Spring, Technical Digest of IEEE/LEOS International Optical MEMS Conference (Sept. 25-28, Okinawa, Japan), pp.145-146 (2001).
4. th Annual Meeting of the IEEE, Vol.1, pp.59-60 (2002). (Invited talk)
5. R. Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu and T. Yamamoto, N. Takeuchi, and Y. Uenishi, Single Crystal 1024ch MEMS Mirror Based on Terraced Electrodes and High-Aspect Ratio Torsion Spring for 3-D Cross-Connect Switch, Technical Digest of IEEE/LEOS International Optical MEMS Conference (Aug. 20-23, Lugano, Switzerland), pp.11-12 (2002).