MOEMS integrated optical monitoring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 221-230

  Hornak, L A ^a   Famouri, P ^a   Dawson, J ^a   Wang, L ^a   Ghaffarian, Reza ^b  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Control; Diffractive optics; Fault detection; Fault prediction; MEMS; Optical metrology; Through wafer optics

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; DIFFRACTIVE OPTICS; ERROR DETECTION; FEEDBACK CONTROL; INTEGRATED OPTICS; OPTICAL DEVICES; OPTICAL RESONATORS; OPTICAL VARIABLES MEASUREMENT; PARAMETER ESTIMATION;

OPTICAL MONITORING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035765766     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443089     Document Type: Article

References (29)

1. Jingdong Chen, Parviz Famouri and Lawrence Hornak, "Nonlinear Control of MEMS: Microengine Sliding Control Simulation," in Proc. International Conference on Intelligent Systems and Control, ISBN 0-88986-261-3, pp 96-101, Santa Barbara, California, October 28-30 (1999).
2. see e.g., Reliability, Testing, and Characterization of MEMS/MOEMS, Conference 4558, SPIE Symp. on Micromachining and Microfabrication, October 21-24, (2001).
3. Daniel J. Burns; Herbert F. Helbig, "A system for automatic electrical and optical characterization of microelectromechanical devices", Journal of Microelectromechanical systems, vol. 8, No. 4, Dec 1999.
4. Phyllis R. Nelson, Patrick B. Chu, Kristofer S.J. Pister, "Optical methods for characterization of MEMS device motion", SPIE vol. 2640 p53-55.
5. A.T.T.D. Tran, J.J. Lee, K. Zhang, "Ultrafine motion detection of micromechanical structures using optical Moire Pattern", IEEE Photonics Technology Letters, vol. 8, No. 8, Aug. 1996.
6. Dickey, Holswade, Christenson, Garcia, and Polosky, "Optical measurement of LIGA milliengine performance," Proc. SPIE Miniaturized Systems with Micro-Optics and Micromechanics III, Vol. 3276, pp. 28-36 (1998).
7. Dickey, et al., "Optical Probe for Micromachine Perf. Analysis," in Proc. SPIE, Vol. 3008, pp. 52-61 (1997).
8. Tran, et al., "Ultrafine Motion Detection of Micromechanical Structures using Optical Moiré Patterns," Photonics Technology Letters, Vol. 8(8), pp. 1058-60 (1996).
9. Nelson, et al., "optical Methods for Char. of MEMS Device Motion," Proc. SPIE, Vol. 2640, pp. 53-57 (1995).
10. J. Dawson, J. Chen, K. Brown, P. Famouri, and L.A. Hornak, "Through-wafer Optical Probe Characterization for MEMS Positional State Monitoring and Feedback Control," J. of Optical Engineering, 39(12), 3239-3246 (2000).
11. F.M. Dickey, S.C. Holswade, L.A. Hornak, and K.S. Brown, "Optical Methods for Micromachine Monitoring and Feedback," Sensors and Actuators A - Physical, Vol. 78, p. 220 (1999).
12. Garcia, et al., "Surface Micromachined Microengine", Sensors and Actuators, 48(3) 203-214, (1995).
13. Hornak, "Polymer Integrated Optics: Enabling technology for Micro-Electro-Mechanical Systems," invited paper Proc SPIE, Vol. 3008, pp. 124-35 (1997).
14. V. Barger and M. Olsson, Classical Mechanics A Modern Perspective, McGraw-Hill Book Co. (1994).
15. A. Kolpekwar and R.D. Blanton, "Development of a MEMS Testing Methodology," IEEE International Test Conference, pp. 923-31 (1997).
16. G.K. Fedder, "Simulation of MEMS," PhD. Thesis, University of California at Berkeley (1994).
17. Y. Cho, et. al., "Viscous Damping Model for Laterally Oscillating Microstructures," IEEE Journal of Microelectromechanical Systems, Vol. 3, No. 2, pp. 81-86 (1994).
18. T.D. Milster, "Optical Servo Signal Generation Techniques for MEMS Applications", SPIE Symposium on Miniaturized Systems with Micro-Optics and MEMS, Santa Clara, CA (Sept. 1999).
19. L. Wang, J.M. Dawson, J. Chen, P. Famouri, and L.A. Hornak, "Stroke-length Control of a MEMS device", Proceedings of the 2000 IEEE International Symposium on Industrial Electronics, pp. 535-539, 2000.
20. P. Famouri, L. Wang, J.M. Dawson, and L.A. Hornak, "MEMS Comb Resonator Real-Time Feedback Control," Electronics Letters, submitted.
21. L. Wang, P. Famouri, J.M. Dawson, and L.A. Hornak, "Active Vibrational damping of a MEMS Comb Resonator," in preparation.
22. Jeffry J. Sniegowski and Ernest J. Garcia, "Microfabricated Actuators and Their Application to Optics", Proc. SPIE Vol. 2383, pp. 46-64.
23. Man, Kin F.," MEMS reliability for space applications by elimination of potential failure modes through testing and analysis", Proceeding of SPIE 1999 MEMS Reliability for Critical and Space Applications sep21-22 1999 v3880 1999 Santa Clara, CA p120-129.
24. Ghaffarian, R., "Reliability Issues of COTS MEMS Packaging," presented at GOMAC 2000.
25. Miller, S.L.; Rodgers, M.S.; La Vigne, G, "Failure mode in surface micromachined microelectromachanical actuation systems", Microelectronics and Reliability v39 n8 1999 Elsevier Science Ltd Exeter Engl p 1229-1237.
26. Danelle M. Tanner, William M. Miller, William P. Eaton, "The effect of frequency on the lifetime of a surface micromachined microengine driving a load", IEEE Proceedings on international Reliability Physics Symposium, March 30-April 2, 1998, pp26-35.
27. Jeffrey M. Jennings and Leslie M. Phinney, "The effect of temperature on surface adhesion in MEMS structures", Proceedings of SPIE conference MEMS Reliability for Critical Apps, Sept. 20,2000, Santa Clara, CA, USA, p 66-75.
28. Kolpekwae, Abhijeet; Kellen, Chris; Blanton, R.D., "MEMS fault model generating using CARAMEL", Proceedings of the IEEE international test conference, Oct 18-21 1998, Washington DC, USA, p557-566.
29. H. Hwang, P. Famouri and C. Sims, "Nonlinear Identification and Control Using Neural Networks and Feedback Linearization", The International Association of Science and Technology for Development, Honolulu, Hawaii, August 19-22, 1996.