Integrated optical monitoring of MEMS for closed-loop control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 34-43

  Dawson, J M ^a   Wang, L ^a   McCormick, W B ^a   Rittenhouse, S A ^a   Famouri, P F ^a   Hornak, L A ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

Diffractive optics; Fault tolerance; Integrated optical moitoring; Linear control; MEMS

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; DIFFRACTIVE OPTICS; FABRICATION; FAILURE ANALYSIS; FAULT TOLERANT COMPUTER SYSTEMS; FEEDBACK; INTEGRATED OPTICS; LINEAR CONTROL SYSTEMS; MEASUREMENTS; OPTICAL DEVICES; OSCILLATORS (ELECTRONIC); ROBUSTNESS (CONTROL SYSTEMS);

INTEGRATED OPTICAL MONITORING;

MICROELECTROMECHANICAL DEVICES;

EID: 0038058809     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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