Influence of process parameters on CNx films obtained by laser-CVD at two wavelengths

Carbon

Volumn 36, Issue 5-6, 1998, Pages 775-780

  Cireasa, R ^a   Crunteanu, A ^a   Alexandrescu, R ^a   Morjan, I ^a   Martin, C ^a   Mihailescu, I N ^a   Oncioiu, G ^b  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b INSTITUTE FOR NUCLEAR RESEARCH   (Romania)

Author keywords

C. Photoelectron spectroscopy

Indexed keywords

EID: 0042765341     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00020-7     Document Type: Article

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