Direct laser writing on porous silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4941, Issue , 2002, Pages 99-106

  Rossi, Andrea M ^a   Borini, Stefano ^a   Boarino, Luca ^a   Amato, Giampiero ^a  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

Laser ablation; Multi layer structure; Optical waveguides; Porous Silicon

Indexed keywords

OPTICAL WAVEGUIDES; POROUS SILICON; THERMAL CONDUCTIVITY;

LASER WRITING;

LASER ABLATION;

EID: 0042730117     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.468493     Document Type: Conference Paper

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