Controllability and homogeneity of optical properties of thin porous silicon films

Materials Research Society Symposium - Proceedings

Volumn 486, Issue , 1998, Pages 119-124

  Uehara, S ^a   Kubo, T ^a   Ogata, S ^a   Sato, T ^a   Hosono, J ^a   Matsubara, T ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; LIGHT REFLECTION; POROUS SILICON; REFRACTIVE INDEX; SILICON WAFERS;

OPTICAL HOMOGENEITY; REFLECTION SPECTROSCOPY;

THIN FILMS;

EID: 0031624764     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)