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Volumn 78, Issue 6, 2002, Pages 465-493
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Molecular structure of interfaces formed with plasma-polymerized silica-like primer films: Part II. Characterization of the primer/metal interface using X-ray photoelectron spectroscopy in situ
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Author keywords
A SiO2 defects; Aluminum; In situ X ray photoelectron spectroscopy; Interfacial analysis; Plasma polymerized films; Suboxide; Titanium
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Indexed keywords
ALUMINUM;
DEPOSITION;
FILMS;
MATHEMATICAL MODELS;
MOLECULAR STRUCTURE;
OXIDATION;
PLASMA ETCHING;
PLASMA POLYMERIZATION;
SILICA;
TITANIUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
PLASMA DEPOSITION;
PRIMER;
SILICA LIKE PRIMER;
SILICON SUBOXIDE;
INTERFACES (MATERIALS);
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EID: 0042624817
PISSN: 00218464
EISSN: None
Source Type: Journal
DOI: 10.1080/00218460213730 Document Type: Article |
Times cited : (14)
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References (23)
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