High-resolution algorithm for quantitative elemental depth profiling by angle-resolved x-ray photoelectron spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2122-2133

  Williams, John M ^a   Beebe Jr , Thomas P ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; DNA; GOLD; IMAGE RECONSTRUCTION; LAPLACE TRANSFORMS; RUTHENIUM; SILVER; SPECTRUM ANALYSIS; SURFACE STRUCTURE; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

ADSORBATE; ANGLE RESOLVED X RAY PHOTOELECTRON SPECTROSCOPY; ATOMIC DEPTH RESOLUTION; CYSTAMINE;

ALGORITHMS;

EID: 0031188204     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580618     Document Type: Article

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