rf-sputtering of PMNT thin films

Journal De Physique. IV : JP

Volumn 11, Issue 11, 2001, Pages

  Fribourg Blanc, E ^a   Cattan, E ^a   Remiens, D ^a   Dupont, M ^a   Osmont, D ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION; FERROELECTRIC THIN FILMS; FERROELECTRICITY; FILM GROWTH; MAGNETRON SPUTTERING; PERMITTIVITY; SOLID SOLUTIONS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

ANNEALING TEMPERATURE; PHASE BOUNDARY; POST DEPOSITION CONVENTIONAL ANNEALING; RELAXOR;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 0035712057     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20011123     Document Type: Conference Paper

References (10)