Thickness dependence of structural and ferroelectric properties of sol-gel Pb(Zr0.56Ti0.44)0.90(Mg1/3Nb 2/3)0.10O3 films

Thin Solid Films

Volumn 330, Issue 2, 1998, Pages 183-189

  Sumi, K ^a   Qiu, H ^a   Kamei, H ^a   Moriya, S ^a   Murai, M ^a   Shimada, M ^a   Nishiwaki, T ^a   Takei, K ^a   Miyashita, S ^a   Hashimoto, M ^b  

^a SEIKO EPSON CORPORATION   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

Ferroelectric properties; Interfaces; Structural properties; Transmission electron microscopy

Indexed keywords

CRYSTAL ORIENTATION; ELECTRODES; FERROELECTRIC MATERIALS; FILM PREPARATION; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); MULTILAYERS; PERMITTIVITY; PEROVSKITE; SOL-GELS; SPUTTER DEPOSITION; TEXTURES;

MULTILAYER SPIN COATING;

DIELECTRIC FILMS;

EID: 0032157933     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00574-4     Document Type: Article

References (22)

1. T. Atsuki, N. Soyama, G. Sasaki, et al., Jpn. J. Appl. Phys. 33 (1994) 5196.
2. K. Amanuma, T. Mori, T. Hase, T. Sakuma, A. Ochi, Y. Miyasaka, Jpn. J. Appl. Phys. 32 (1993) 4150.
3. K.R. Udayakumar, P.J. Schuele, J. Chen, S. B. Krupanidhi, L.E. Cross, J. Appl. Phys. 77 (1995) 3981.
4. T. Mihara, H. Yoshimori, H. Watanabe, C.A.P. de Araujo, Jpn. J. Appl. Phys. 34 (1995) 2380.
5. K. Hasegawa, M. Shimada, M. Sawada, US Patent No. 553,046,5, (1996).
6. S. Wakabayashi, M. Sakata, H. Goto, M. Takeuchi, T. Yada, Jpn. J. Appl. Phys. 35 (1996) 5012.
7. J.F. Scott, C.A. Araujo, B.M. Melnick, L.D. McMillan, R. Zuleeg, J. Appl. Phys. 70 (1991) 382.
8. P.K. Larsen, G.J.M. Dormans, D.J. Taylor, P.J. van Veldhoven, J. Appl. Phys. 76 (1994) 2405S.
9. J.J. Lee, S.B. Desu, Ferroelect. Lett. 20 (1995) 27.
10. S.K. Dey, J.J. Lee, P. Alluri, Jpn. J. Appl. Phys. 34 (1995) 3142.
11. K. Sumi, H. Qiu, H. Kamei, et al., Thin Solid Films, in press.
12. S. Miyashita, M. Shinozuka, K. Sumi, Eur. Patent Appl., EP 736915, (1996).
13. K. Sreenivas, I. Reaney, T. Maeder, N. Setter, C. Jagadish, R.G. Elliman, J. Appl. Phys. 75 (1994) 232.
14. S.T. Kim, C.Y. Kim, K.H. Park, K.Y. Kim, J.S. Lee, Y.W. Jeong, H.J. Kwon, Jpn. J. Appl. Phys. 34 (1995) 4945.
15. A. Barna, Mater. Res. Soc. Symp. Proc. 254 (1991) 3.
16. C.J. Kim, D.S. Yoon, J.S. Lee, C.G. Choi, K. No, Jpn. J. Appl. Phys. 33 (1994) 2675.
17. C.J. Kim, D.S. Yoon, Z.T. Jiang, K. No, J. Mater. Sci. 32 (1997) 1213.
18. K.G. Brooks, I.M. Reaney, R. Klissursk, Y. Huang, L. Bursill, N. Setter, J. Mater. Res. 9 (1994) 2540.
19. H.D. Chen, K.R. Udayakumar, C.J. Gaskey, L.E. Cross, J.J. Bernstein, L.C. Niles, J. Am. Ceram. Soc. 79 (1996) 2189.
20. Y.L. Tu, S.J. Milne, J. Mater. Res. 11 (1996) 2556.
21. J.S. Zhu, X.M. Lu, P. Li, W. Jiang, Y.N. Wang, Solid State Commun. 101 (1997) 263.
22. K. Nakajima, S. Sudo, S. Aoki, SHINKU, 37 (1994) 10 in Japanese.