Development of a low-cost 8×8 optical switch using micro hot embossing

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 21-22

  Shan, X C ^a,b   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MOEMS;

HOT EMBOSSING PROCESS; INPUT AND OUTPUTS; LOW COSTS; MICRO HOT EMBOSSING; POLYMER MATERIALS; SILICON SUBSTRATES;

OPTICAL SWITCHES;

EID: 84963730840     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031424     Document Type: Conference Paper

References (3)

1. J. A. Walker: MSTnews on microsystems and MEMS; vol. 3 (2000); pp.6-9
2. Y. Hashiura, R. Maeda, et al: Proc. of SPIE, Adelaide, Australia, 2001; pp.414-421
3. H. Han, et al: SPIE'96, vol. 2691; pp. 118-123