Fabrication of microfluidic devices in silicon and plastic using plasma etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2846-2851

  Weston, D F ^a   Smekal, T ^a   Rhine, D B ^a   Blackwell, J ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BODY FLUIDS; DNA; ELECTROPHORESIS; FABRICATION; MEDICAL APPLICATIONS; OPTIMIZATION; PLASTICS; SILICON;

HOT EMBOSSING; MICROFLUIDIC DEVICES; SILICON MASTER;

PLASMA ETCHING;

EID: 0035519426     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421571     Document Type: Article

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